1results about How to "Achieving High Sensitivity Detection" patented technology

The application discloses a self-powered micro hair-like sensor, which comprises a hair structure, a mechanical structure layer and a substrate; the hair structure is bonded with the mechanical structure layer through a micro assembly process; the mechanical structure layer is provided with a moving platform, a constraint unit and a bridge amplification unit obtained through an etching process; the mechanical structure layer is bonded with the substrate as one of friction layers; the substrate is another friction layer; the moving platform is connected to the root of the hair structure; the moving platform is in a rectangular shape, one set of opposite sides of the rectangular shape are connected with corresponding constraint units respectively, and the other set of opposite sides are connected with corresponding bridge amplification units respectively; and the two bridge amplification units are connected through the corresponding constraint units. The self-powered micro hair-like sensor realizes self-power supply and sensing detection functions based on the frictional volt effect, realizes high-sensitivity detection of physical quantities such as flow rate and acceleration, and effectively improves the portability and power consumption ratio of equipment.