Method for manufacturing alternating current electrophoresis directionally assembled carbon nanotube array sensing device

Abstract

The invention discloses a method for preparing an alternating current electrophoresis directionally assembled carbon nanotube array sensing device, which is characterized by comprising the following steps: making a diagram of an alternating-current electrophoresis metal electrode by using a photoetching method or a metal deposition method; growing a graphene film on the alternating-current electrophoresis metal electrode; applying alternating-current electrophoresis to ultrasonically dispersed carbon nanotubes by using the graphene-covered metal electrodes to perform directional assembly to form a carbon nanotube array; removing or oxidating metal tubes in the carbon nanotube array by using an overload current burning method or an ultraviolet lighting method, or simultaneously removing the metal tubes in the carbon nanotube array by combining the two methods; and modifying the directional carbon nanotube array with metal nanometer particles or polymers. The method uses the graphene-covered metal electrode as the alternating-current electrophoresis electrode to prepare a high-performance directional high-intensity carbon nanotube array field effect device, improves the sensitivity and the detection selectivity of the device, and can realize the high-sensitivity portable detection of gas which pollutes the environment.

Description

technical field [0001] The invention relates to a method for manufacturing a nanosensor, in particular to a method for manufacturing a carbon nanotube array sensor device using alternating current electrophoresis for directional assembly, to detect nitrogen oxide (NOX) pollutants, benzene series, hydrogen, etc. , belonging to the field of nanotechnology. Background technique [0002] In the 1990s, the discovery of carbon nanotubes rekindled people's research interest in ancient carbon materials and promoted the rapid development of nanomaterials and technologies. In 2004, the A.K.Geim group of the University of Manchester in the United Kingdom made a breakthrough in the preparation of graphite samples with a single atomic layer thickness by mechanical exfoliation. Single-walled carbon nanotubes (SWNTs) and graphene are quasi-one-dimensional and two-dimensional carbon nanostructure materials composed of single-layer graphite sheets, which have excellent mechanical, electrica...

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Problems solved by technology

[0007] The purpose of the present invention is to provide a method for fabricating a carbon nanotube array sensor device assembled by alternating current electrophoresis, which solves the defects of low sensitivity and selectivity of traditional carbon nanotube arrays, and realizes and improves the overall performance of carbon nanotube field effect devices

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