Spiral fluid dynamic pressure polishing pad and polishing method thereof

Abstract

The invention discloses a spiral fluid dynamic pressure polishing pad and a polishing method thereof, and aims to change polishing action modes of a tangent point and a tangent line of a traditional spherical tool and a cylindrical tool and expand action area between the tool and a workpiece to a surface contact mode to improve the polishing efficiency. According to the polishing pad and the polishing method, a center liquid supply hole and a middle liquid storage area are formed in the center of a polishing pad base body, spiral dynamic pressure grooves are formed in the surface, and the spiral dynamic pressure grooves are uniformly distributed on the surface of the polishing pad base body; in the polishing process, a polishing solution mixed with polishing particles in advance is injected into a liquid film gap between the polishing pad and the surface of the workpiece from the central liquid supply hole under a pressure, and meanwhile, the polishing pad rotates at a high speed so asto enhance the dynamic pressure effect of the polishing solution in the liquid film gap; and according to a fluid dynamics theory, fluid dynamic pressure and fluid shearing force in the liquid film gap can obviously improve the effect of the particles in the polishing solution on eroding the surface of an optical element, remove material on the surface of the element and achieve the purpose of polishing.

Description

technical field [0001] The invention relates to optical processing technology, in particular to a disc-type fluid dynamic pressure polishing pad based on a small grinding head polishing tool and a polishing method, in particular to a fluid dynamic pressure ultra-precision polishing method. Background technique [0002] With the development of modern optical technology, large-aperture aspheric optical elements and off-axis aspheric optical elements are widely used in remote sensing satellites, space-based space telescopes, ground-based space telescopes, and inertial confinement nuclear fusion. Taking the optical imaging system as an example, the larger the aperture of the optical element, the higher the final resolution and the stronger the energy collection ability. Therefore, large aperture has also become a trend in the development of modern aspheric optical elements. However, the increase in the aperture of the aspheric optical element often leads to an increase in proces...

AI Technical Summary

Problems solved by technology

However, in the dynamic pressure polishing process based on the tangent point and tangent method, the working area of ​​the tool is very limited, and it is difficult to meet the processing requirements of the surface of the large-aperture aspheric optical element

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