vapor monitoring

A liquid target and particle technology, applied in electrical components, X-ray tube gas control, X-ray tube gas filling materials, etc., can solve problems such as window blur, cathode efficiency reduction, system performance degradation, etc.

Active Publication Date: 2022-01-07
EXCILLUM
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This leads to gradual degradation of system performance as deposited debris can obscure the windows and reduce the efficiency of the cathode

Method used

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Embodiment Construction

[0063] will now refer to figure 1 An X-ray source 100 according to an embodiment of the present invention is described. Such as figure 1 As indicated in , the vacuum chamber 120 may be defined by an enclosure 122 and an X-ray transparent window 124 that separates the vacuum chamber 120 from the surrounding atmosphere. X-rays 134 may be generated by an interaction region T in which electrons from electron beam 132 may interact with target J.

[0064] An electron beam 132 directed towards the interaction region T may be generated by an electron source 130, such as an electron gun 130 comprising a high voltage cathode. The electron beam 132 may follow a trajectory or path between the electron source 130 and the interaction region T, wherein the trajectory may be adjusted by the configuration of the electron optics and / or the electron source. The electron source may further be controllable to allow adjustment of parameters of the electron beam such as for example beam current, ...

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Abstract

A method for generating X-ray radiation is disclosed. The method comprises: providing (10) a liquid target (J) in a chamber (120); directing an electron beam (132) towards the liquid target (20) such that the electron beam interacts with the liquid target to generate x-rays irradiating (134); estimating (30) the number of particles produced by the interaction between the electron beam and the liquid target by measuring the number of positively charged particles in the chamber and eliminating the estimated contribution from scattered electrons the contribution of the number of particles; and controlling (40) the temperature in the region of the electron beam and / or the liquid target in which the electron beam interacts with the target such that the estimated number of particles is below a predetermined limit effect. A corresponding X-ray source is also disclosed.

Description

technical field [0001] The invention disclosed herein relates generally to electron impact X-ray sources comprising a liquid anode. In particular, the invention relates to techniques for controlling an X-ray source based on the estimated number of particles produced by the interaction between an electron beam and a liquid target. Background technique [0002] A system for generating X-rays by irradiating a liquid target is described in the Applicant's International Application PCT / EP2009 / 000481. In these systems, an electron source comprising a high voltage cathode is utilized to generate a beam of electrons that impinges on a liquid target. The target is preferably formed by a jet of liquid metal disposed within the vacuum chamber. During operation, the location in space where a part of the liquid jet is struck by the electron beam is called the interaction region or point of interaction. X-ray radiation generated by the interaction between the electron beam and the liqu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J35/20H01J35/30H01J35/04
CPCH01J35/20H01J35/30H05G1/30H01J2235/082H01J2235/1204H01J2235/1225H01J35/116H01J35/147H01J35/16H01J2235/20H05G1/265H05G1/36
Inventor 波尔·塔克曼汤米·图希玛
Owner EXCILLUM
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