Pressure sensor and preparation method of pressure sensor

Abstract

The invention discloses a pressure sensor and a preparation method of the pressure sensor. The pressure sensor comprises a first substrate and a second substrate, wherein a first electrode and a second electrode which are mutually independent are arranged on the first substrate; a public electrode is arranged on the second substrate; orthographic projection of the first electrode and the orthographic projection of the second electrode on the second substrate both are at least partially overlapped with the orthographic projection of the public electrode on the second substrate; a fluid medium is packaged between the first substrate and the second substrate, the first electrode can form a first capacitor with the fluid medium and the public electrode, the second electrode can form a second capacitor with the fluid medium and the public electrode, and the fluid medium can flow between the first capacitor and the second capacitor under the action of an external force. The sensor provided by the invention cannot generate abrasion of devices, cannot cause a problem of reduction of service life of the devices, meanwhile, devices used for the sensor are simple, so, production cost is reduced.

Description

technical field

[0001] The invention relates to the technical field of sensors, in particular to a pressure sensor and a preparation method of the pressure sensor. Background technique

[0002] At present, the principle of the capacitive pressure sensor on the market is: use the change principle of d in C=εS / d (ε is the dielectric constant, S is the area, and d is the distance) for production. The current pressure sensor includes the metal sheet of the common electrode and the metal electrodes on both sides. When there is external pressure, the metal sheet of the common electrode bends, which changes the two capacitors C1 and C2 formed by the metal sheet of the common electrode and the metal electrodes on both sides. The distances are d1 and d2. Due to the changes of d1 and d2, the capacitance values ​​of C1 and C2 also change accordingly, thereby generating a capacitance difference and then generating a current. However, due to the current material properties of the common...

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