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A compact Hartmann wavefront sensor

A sensor and compact technology, applied in the field of optical information measurement, can solve the problems of increasing the volume and weight of the wavefront sensor, limiting the application of the sensor, etc., achieving the effect of reducing the volume, light and thin the overall structure, and realizing simple effects

Active Publication Date: 2021-09-21
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

Therefore, the current large-aperture Hartmann wavefront sensors all use a huge optical beam shrinker module, which greatly increases the volume and weight of the wavefront sensor and severely limits the application of the sensor in many compact optical systems.

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  • A compact Hartmann wavefront sensor
  • A compact Hartmann wavefront sensor

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Embodiment Construction

[0017] The present invention will be further described below in conjunction with drawings and embodiments.

[0018] Such as figure 1 As shown, the compact Hartmann wavefront sensor in Embodiment 1 of the present invention has a two-level aperture division array, including a first-level aperture division and beam reduction optical element array 1, a second-level aperture division optical element array 2, and an image sensor array 3. Among them, the number of arrays of primary aperture division and beam reduction optical elements is 8×8, and each primary aperture division and beam reduction optical element is an independent optical beam reduction structure, so the incident beam to be measured is divided by the primary aperture division and The beam reduction optical element array 1 divides and reduces beams into an 8×8 thin beam array. The secondary aperture division optical element array 2 has 8×8 microlens arrays, which form a one-to-one correspondence with the primary apert...

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Abstract

The invention discloses a compact Hartmann wavefront sensor, which comprises an aperture division optical beam reduction module array, a microlens array and a camera array. The aperture division beam reduction module array performs aperture division and aperture reduction on an incident beam. Divide the incident large-size beam into an array of small-size sub-beams to achieve front-stage aperture division and beam reduction; the microlens array group performs end-aperture division on each reduced beam sub-beam to realize the wave of a single sub-beam For front slope sampling, the camera array is located at the focal plane of each sub-beam microlens array, and is used to detect the spot array image of each sub-beam passing through the microlens array, and all the spot array images of the camera array are fused to obtain the incident beam corresponding to the complete The full-scale spot array image can finally use the Hartmann wavefront sensor restoration algorithm to extract the full-aperture wavefront slope data from the spot array image and reconstruct the wavefront phase information of the incident beam.

Description

technical field [0001] The invention belongs to the technical field of optical information measurement, and relates to a device for measuring the wavefront of an incident light beam, in particular to a Hartmann wavefront sensor with a compact structure. Background technique [0002] Hartmann wavefront sensing technology has become one of the most widely used wavefront sensing technologies due to its simple structure, high light energy utilization rate, fast measurement speed, and strong environmental adaptability. Typical Hartmann wavefront sensor structure can refer to the Hartmann-Shack wavefront sensor scheme proposed by B.C.Platt and R.V.Shack et al. (B.C.Platt and R.V.Shack, "Lenticular Hartmann Screen," Opt.Sci.Newsl.5 ,15–16, 1971), through a special array type wavefront split sampling optical element (such as a microlens array), the incident beam is aperture-segmented and focused on the image sensor, and the image sensor detects a one-to-one correspondence with the a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J9/00
CPCG01J9/00G01J2009/002
Inventor 王帅汤国茂赖柏衡杨平程涛何星江炜
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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