Antioxidant Al2O3/TiSiN composite coating and preparation method thereof

A technology of titanium silicon nitride and composite coating, which is applied in the direction of coating, metal material coating process, ion implantation plating, etc., can solve the problems of low deposition temperature, insufficient energy, difficulty in obtaining the use effect, etc., and achieve a firm combination , avoid the effect of low hardness and high toughness

Active Publication Date: 2020-01-03
SICHUAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the low deposition temperature of the physical vapor deposition method, the deposition of α-Al by this method 2 o 3 Insufficient energy, Al prepared by physical vapor deposition method 2 o 3 Coatings are usually amorphous or other crystalline structures, making it difficult to obtain ideal results

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Put the clean cemented carbide substrate into the vacuum chamber of the plasma-enhanced composite ion coating system, and when the vacuum of the back is evacuated to 0.05Pa, turn on the auxiliary heating device on the furnace wall to heat the substrate, and at the same time turn on the rotating power to make the substrate Rotate continuously, heat until the substrate temperature reaches 380°C; then pass argon gas into the vacuum chamber, adjust the flow rate of argon gas to ensure the pressure is 0.1Pa, and then apply a DC bias of -100V and a pulse bias of -150V to the substrate , using the ionized Ar + Etch the surface of the substrate for 60 minutes; turn off the bias voltage of the substrate in turn, adjust the flow of argon to ensure that the working pressure is 0.2Pa, turn on the main arc power supply of evaporation plating for evaporation coating, the main arc current on the crucible is 200A, and evaporate the raw material for Co 0.2 Ni 0.2 Cr 0.2 al 0.2 Y 0....

Embodiment 2

[0028] Put the clean cermet substrate into the vacuum chamber of the plasma-enhanced compound ion coating system, and when the vacuum on the back is evacuated to 0.04Pa, turn on the auxiliary heating device on the furnace wall to heat the substrate, and turn on the rotating power supply at the same time so that the substrate does not Stop rotating and heat until the temperature of the substrate reaches 380°C; then pass argon gas into the vacuum chamber, adjust the flow rate of argon gas to ensure the pressure is 0.25Pa, and then apply a DC bias voltage of -100V and a pulse bias voltage of -300V to the substrate, Using ionized Ar + Etch the surface of the substrate for 90 minutes; turn off the bias voltage of the substrate in turn, adjust the flow of argon to ensure that the working pressure is 0.15Pa, turn on the main arc power supply of evaporation plating for evaporation coating, the main arc current on the crucible is 220A, and evaporate the raw material for Co 0.2 Ni 0.2...

Embodiment 3

[0030] Put the clean cemented carbide substrate into the vacuum chamber of the plasma-enhanced composite ion coating system, and when the vacuum of the back is evacuated to 0.05Pa, turn on the auxiliary heating device on the furnace wall to heat the substrate, and at the same time turn on the rotating power to make the substrate Rotate continuously, heat until the substrate temperature reaches 380°C; then pass argon gas into the vacuum chamber, adjust the flow rate of argon gas to ensure the pressure is 0.15Pa, and then apply a DC bias of -200V and a pulse bias of -400V to the substrate , using the ionized Ar + Etch the surface of the substrate for 80 minutes; turn off the bias voltage of the substrate in turn, adjust the flow of argon to ensure that the working pressure is 0.2Pa, turn on the main arc power supply of the evaporation plating for evaporation coating, the main arc current on the crucible is 210A, and evaporate the raw material for Co 0.2 Ni 0.2 Cr 0.2 Al 0.2 ...

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Abstract

The invention discloses an antioxidant Al2O3/TiSiN composite coating. The antioxidant Al2O3/TiSiN composite coating is an integral whole consisting of five sub-layers, namely a CoNiCrAlY high-entropyalloy bonding layer, an alpha-Cr2O3 oxide template layer, an alpha-Al2O3 oxide core layer, a TiSiO oxide transition layer and a TiSiN nitride surface layer, which are arranged from inside to outside.The antioxidant Al2O3/TiSiN composite coating has a total thickness of 1 [mu]m to 3.5 [mu]m. A preparation method of the antioxidant Al2O3/TiSiN composite coating comprises the following steps of performing heating and ion etching on a substrate; depositing a CoNiCrAlY layer on the substrate by an arc evaporation plating process; and continuously depositing a alpha-Cr2O3 layer, an alpha-Al2O3 layer, a TiSiO layer and a TiSiN layer in sequence by a cathodic arc ion plating process. Since the alpha-Al2O3 oxide coating and the nitride coating are combined, the antioxidant Al2O3/TiSiN composite coating not only has excellent oxidation resistance but also presents favorable wear resistance under a high-temperature working condition. The preparation method and is simple and easy to implement.

Description

technical field [0001] The invention belongs to the technical field of cutting tool surface coatings, in particular to an anti-oxidation aluminum oxide / titanium silicon nitride composite coating and a preparation method thereof. Background technique [0002] With the development and progress of cutting technology and the improvement of cutting requirements, cutting tools, including coating materials on their surfaces, are facing challenges. The new cutting technology represented by dry chips and high-speed cutting is characterized by an increase in the temperature of the cutting area, and a corresponding increase in the temperature of the cutting part of the tool. Therefore, in addition to the failure of the surface wear of the coated tool, the coating also often fails due to oxidation. Nitride hard coating is a widely used coating material on the surface of cutting tools. Nitride coating is easy to interact with oxygen in the air under high temperature conditions. Nitride i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/16C23C14/08C23C14/06C23C14/02
CPCC23C14/022C23C14/025C23C14/0641C23C14/081C23C14/083C23C14/16C23C14/325
Inventor 鲜广鲜丽君赵海波
Owner SICHUAN UNIV
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