High-sensitivity piezoelectric air pressure sensor and preparation method thereof

An air pressure sensor and high-sensitivity technology, used in fluid pressure measurement, instruments, and fluid pressure measurement using piezoelectric devices. Flexibility and sensitivity, high piezoelectric coefficient, small volume effect

Inactive Publication Date: 2020-01-14
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method has a complex structure and high cost, and it is difficult to enter the market and be popularized. Currently, it is only used in scientific research environments such as laboratories.
[0004] Piezoelectric sensors have high sensitivity and passive characteristics, and are easy to integrate on the surface of other structures. Flexible piezoelectric sensors have made progress in the laboratory and are expected to replace capacitive air pressure sensors. However, the piezoelectric film is thin and susceptible to external Destruction of matter requires designing structures to protect piezoelectric films

Method used

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  • High-sensitivity piezoelectric air pressure sensor and preparation method thereof
  • High-sensitivity piezoelectric air pressure sensor and preparation method thereof
  • High-sensitivity piezoelectric air pressure sensor and preparation method thereof

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preparation example Construction

[0039] Such as figure 1 Shown, the preparation method of air pressure sensor in the present invention comprises the steps:

[0040] S1: Pretreat the target, surface grinding, polishing, and purging the surface with a nitrogen gun. In addition, the Mica mica substrate is manufactured and cleaned with ethanol and deionized water in a plasma cleaning agent. When finished, glue the Mica mica to the heating table using silver glue and dry it in a low-temperature dryer.

[0041] S2: Set the relevant parameters of the pulsed laser deposition equipment: pulse number 10000-50000 times, pulse frequency 5-10HZ, target-base distance 35-55mm, oxygen partial pressure 100-300mtorr, etc., start the equipment, and deposit nanoscale pressure on the surface of Mica. Electric thin film.

[0042] S3: Set the annealing temperature to 650-750°C, change the oxygen partial pressure to an atmospheric pressure of 760 torr, and hold the temperature for a certain time of 1-3 hours, and perform in-situ ...

Embodiment 1

[0053] S1: Pretreat the target, surface grinding, polishing, and purging the surface with a nitrogen gun. In addition, the Mica mica substrate is manufactured and cleaned with ethanol and deionized water in a plasma cleaning agent. When finished, glue the Mica mica to the heating table using silver glue and dry it in a low-temperature dryer.

[0054] S2: Set up the relevant parameters of the pulsed laser deposition equipment: pulse number 10000 times, pulse frequency 5HZ, target base distance 35mm, oxygen partial pressure 100mtorr, etc., start the equipment, and deposit nanoscale piezoelectric film on the surface of Mica.

[0055] S3: Set the annealing temperature to 650°C, change the oxygen partial pressure to an atmospheric pressure of 760 torr, and hold the temperature for a certain time for 3 hours, and perform in-situ annealing on the film at a certain cooling rate of 5°C / min.

[0056] S4: For a piezoelectric film with better quality, stick a mask, and use evaporation eq...

Embodiment 2

[0060] S1: Pretreat the target, surface grinding, polishing, and purging the surface with a nitrogen gun. In addition, the Mica mica substrate is manufactured and cleaned with ethanol and deionized water in a plasma cleaning agent. When finished, glue the Mica mica to the heating table using silver glue and dry it in a low-temperature dryer.

[0061] S2: Set up the relevant parameters of the pulse laser deposition equipment: pulse number 10000 times, pulse frequency 5HZ, target base distance 55mm, oxygen partial pressure 300mtorr, etc., start the equipment, and deposit nanoscale piezoelectric film on the surface of Mica.

[0062] S3: Set the annealing temperature to 750°C, change the oxygen partial pressure to an atmospheric pressure of 760 torr, and hold the temperature for a certain time for 3 hours, and perform in-situ annealing on the film at a certain cooling rate of 15°C / min.

[0063] S4: For a piezoelectric film with better quality, stick a mask, and use evaporation eq...

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Abstract

The invention belongs to the field of piezoelectric sensors, and discloses a high-sensitivity piezoelectric air pressure sensor and a preparation method thereof. The pressure sensor comprises a barrier layer, a functional layer and a cavity layer from top to bottom, wherein the barrier layer is an elastic film, which is used for protecting the functional layer from external erosion; the functionallayer comprises a mica film, a piezoelectric film and an electrode, the mica film is used as a carrier of the piezoelectric film, the piezoelectric film is attached to the mica film, and the electrode is disposed on the piezoelectric film; the cavity layer is disposed below the functional layer, and the substrate of the cavity layer and the functional layer form a sealed hollow cavity; when the external air pressure forms a pressure difference with the air pressure in the hollow cavity, the piezoelectric film is deformed, the deformation is converted into an electric signal, and the electrodetransmits the electric signal to a detection device so as to realize the detection of the air pressure. The invention further discloses a preparation method of the air pressure sensor. By adopting the preparation method disclosed by the invention, the prepared air pressure sensor has good flexibility and high sensitivity.

Description

technical field [0001] The invention belongs to the field of piezoelectric sensors, and more specifically relates to a high-sensitivity piezoelectric air pressure sensor and a preparation method thereof. Background technique [0002] Barometric pressure sensors are widely used in daily life, but most common barometers have low sensitivity, while high-precision barometers are often bulky and have limited measurement ranges, which are not suitable for carrying in daily life. In addition, most barometers on the market require an external power supply, which is not conducive to the use of sensors in high-temperature and low-temperature environments. It is of great significance to prepare passive and light-weight air pressure sensors. [0003] The principle of the membrane meter on the market is based on the strain of the elastic membrane under the action of the pressure difference, which causes the change of capacitance, and measures the voltage by detecting the change of capaci...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/08G01L19/00
CPCG01L9/08G01L19/00
Inventor 陈蓉陈志平曹坤熊英飞李易诚完颜剑峰
Owner HUAZHONG UNIV OF SCI & TECH
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