Tracker transfer parameter optimization method and device for three-dimensional thermal expansion deformation of workpiece
An optimization method, a technology of instrument transfer station, applied in the field of digital measurement, can solve the problem of not considering three-dimensional thermal deformation and so on
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[0091] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.
[0092] The method and device for optimizing the parameters of the tracker transfer station for the three-dimensional thermal expansion and deformation of the workpiece according to the embodiments of the present invention will be described below with reference to the accompanying drawings.
[0093] First, a method for optimizing parameters of a tracker transfer station for three-dimensional thermal expansion and deformation of a workpiece according to an embodiment of the present invention will be described with reference to the a...
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