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A transmission electron microscope in-situ electrochemical detection chip and its manufacturing method

An in-situ electrochemical and detection chip technology, applied in the direction of material electrochemical variables, measuring devices, scientific instruments, etc., can solve the problems of inaccurate control potential, achieve high safety, reduce background noise, and improve imaging resolution Effect

Active Publication Date: 2021-11-09
XIAMEN CHIP NOVA TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The invention provides an in-situ electrochemical detection chip for a transmission electron microscope and a manufacturing method thereof, the purpose of which is to realize the integrated design of the in-situ electrochemical detection chip, and at the same time solve the problem of inaccurate control potential of the above-mentioned in-situ chip after introducing an electric field

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  • A transmission electron microscope in-situ electrochemical detection chip and its manufacturing method
  • A transmission electron microscope in-situ electrochemical detection chip and its manufacturing method
  • A transmission electron microscope in-situ electrochemical detection chip and its manufacturing method

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Embodiment 1

[0046] Embodiment 1 of the present invention discloses a transmission electron microscope in-situ electrochemical detection chip, such as figure 1 , figure 2 , image 3 As shown, it includes an upper sheet 1 and a lower sheet 8. The upper sheet 1 is made of a silicon substrate 3 with silicon nitride layers 2 and 4 on both sides, and the silicon substrate 3 of the upper sheet 1 has two symmetrical liquid injection ports 6 and an electron beam window 7 ; The silicon substrate 3 of the upper sheet 1 is provided with a metal bonding layer 5 on one side. The lower sheet 8 is made of a silicon substrate 12 with insulating layers 10, 14 and silicon nitride layers 11, 13 on both sides, and one side of the silicon substrate 12 of the lower sheet 8 is provided with a reference electrode and a working electrode. and a three-electrode system 9 for the counter electrode; an observation window 15 is provided at the center of the lower sheet 8 ; the upper sheet 1 and the lower sheet 8 ar...

Embodiment 2

[0075] Embodiment 2 of the present invention discloses a transmission electron microscope in-situ electrochemical detection chip, such as figure 1 , figure 2 , image 3 As shown, it includes an upper sheet 1 and a lower sheet 8. The upper sheet 1 is made of a silicon substrate 3 with silicon nitride layers 2, 4 on both sides, and there are two symmetrical liquid injection ports 6 and an electron beam window on the silicon substrate 3 of the upper sheet 1. 7. A metal bonding layer 5 is provided on one side of the silicon substrate 3 of the upper sheet 1 . The lower sheet 8 is made of a silicon substrate 12 with insulating layers 10, 14 and silicon nitride layers 11, 13 on both sides, and one side of the silicon substrate 12 of the lower sheet 8 is provided with a reference electrode and a working electrode. and a three-electrode system 9 for the counter electrode; an observation window 15 is provided at the center of the lower sheet 8 ; the upper sheet 1 and the lower sheet...

Embodiment 3

[0104] Embodiment 3 of the present invention discloses a transmission electron microscope in-situ electrochemical detection chip, such as figure 1 , figure 2 , image 3 As shown, it includes an upper sheet 1 and a lower sheet 8. The upper sheet 1 is made of a silicon substrate 3 with silicon nitride layers 2, 4 on both sides, and there are two symmetrical liquid injection ports 6 and an electron beam window on the silicon substrate 3 of the upper sheet 1. 7. A metal bonding layer 5 is provided on one side of the silicon substrate 3 of the upper sheet 1 . The lower sheet 8 is made of a silicon substrate 12 with insulating layers 10, 14 and silicon nitride layers 11, 13 on both sides, and one side of the silicon substrate 12 of the lower sheet 8 is provided with a reference electrode and a working electrode. and a three-electrode system 9 for the counter electrode; an observation window 15 is provided at the center of the lower sheet 8 ; the upper sheet 1 and the lower sheet...

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Abstract

The invention provides a transmission electron microscope in-situ electrochemical detection chip, which includes an upper chip and a lower chip. The upper and lower sheets are made of a silicon substrate with insulating layers or silicon nitride layers on both sides. The upper sheet is provided with two symmetrical liquid injection ports and an electron beam window; the silicon substrate side of the upper sheet is provided with a metal bonding layer. One side of the silicon substrate of the lower sheet is provided with a three-electrode system including a reference electrode, a working electrode and a counter electrode; an observation window is arranged at the center of the lower sheet; catch. The invention provides a method for manufacturing a transmission electron microscope in-situ electrochemical detection chip. The in-situ electrochemical detection chip has three electrodes and an insulating layer, which can realize the detection of samples under the condition of electrification, the electric field is uniform, and the safety is high. , Strong controllability, at the same time, the silicon nitride layer is used as the support layer, which can effectively improve the imaging resolution and reduce the background noise.

Description

technical field [0001] The invention belongs to the field of in-situ characterization of a transmission electron microscope, in particular to an in-situ electrochemical detection chip for a transmission electron microscope and a manufacturing method thereof. Background technique [0002] Transmission Electron Microscope (TEM) is a microscopic morphology observation tool, which can directly use the material properties of the sample surface material for microscopic imaging, and observe the advantages of the fine structure of the uneven surface of various samples. Its sample carrier sample table is equipped with an in-situ detection chip, which can make the resolution reach the nanometer level. The in-situ detection chip can integrate physical and chemical functions, realize patterning and functionalization, and has great advantages in molecular biology, chemical industry, and medical semiconductor electronic materials. High application value. Build a visualization window in t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/04G01N23/20058G01N23/20008G01N27/416G01N27/30G01N27/26
CPCG01N23/04G01N23/2005G01N23/20058G01N27/30G01N27/416
Inventor 廖洪钢
Owner XIAMEN CHIP NOVA TECH CO LTD