A kind of recycling and processing equipment for microelectronic materials and semiconductor raw materials

Abstract

The invention discloses a device for recycling and processing microelectronic materials and semiconductor raw materials, which comprises a box body and a melting box arranged inside the box body. There are outriggers, an electric heating plate is fixedly installed on the inner wall of the melting box, a discharge nozzle connected with the outside of the box is provided at the lower end of the melting box, and a plurality of crushing rollers are evenly distributed on the upper end of the inner wall of the box. The invention integrates the drying, crushing and melting processes in the recycling process of semiconductor raw materials by setting the driving mechanism, crushing roller, electric heating plate, pumping mechanism, air guide chamber and gas injection port, reducing the space occupied by the production line and Labor costs can also be blown and spread the raw materials on the crushing roller to improve the crushing efficiency. At the same time, it can automatically realize the positive correlation adjustment of the production speed between each process, without manual operation, reduce labor intensity, and is not easy to make mistakes, avoiding production Into chaos.

Description

technical field [0001] The invention relates to the technical field of semiconductor reprocessing equipment, in particular to a recycling and processing equipment for microelectronic materials and semiconductor raw materials. Background technique [0002] Microelectronic material is a kind of semiconductor material synthesized by GeSi alloy and wide bandgap. Microelectronic material and devices are the foundation of microelectronic industry. In order to promote the development of microelectronic industry and make full use of materials, the general Waste microelectronic materials and semiconductor raw materials will be recycled and reprocessed for secondary use. [0003] The existing recycling and reprocessing process of semiconductor raw materials generally includes cleaning, drying, crushing, melting and recasting of raw materials, which leads to a long production line for recycling and reprocessing semiconductor raw materials, and each process on the production line needs ...

AI Technical Summary

Problems solved by technology

[0004] To sum up, the semiconductor raw material recovery and reuse equipment in the prior art has the following disadvantages: first, there are many production processes, the production line is long, and it needs to occupy more production space and be equipped with more operators; 2. Raw materials are easy to accumulate somewhere on the upper end of the crushing roller during crushing, resulting in a significant reduction in crushing efficiency; 3. The production speed between various processes cannot be automatically adjusted, and manual adjustment is required, which not only troubles the operation, but also increases labor intensity. , and the operation process is prone to errors, leading to chaos in production

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