Detection panel and manufacturing method thereof, and photoelectric detection device

Abstract

The invention discloses a detection panel and a manufacturing method thereof, and a photoelectric detection device. According to the invention, a reflection structure is arranged between a substrate in each detection pixel unit and a detection circuit, when visible light enters the detection pixel unit area, the visible light is emitted, the reflection structure can reflect the visible light penetrating through the pixel plane from a gap between a photodiode and the peripheral wiring to the photodiode area, as a first electrode in the photoelectric conversion structure is a light-transmittingelectrode, the visible light reflected back to the photodiode area can be absorbed by the photodiode again, so the visible light penetrating through a pixel plane from the gap between the photodiode and the peripheral wiring is effectively utilized, photoelectric effect sensitivity of the pixel can be remarkably improved on the premise of not influencing the resolution, and the pixel sensitivity level in the prior art can be remarkably improved.

Description

technical field [0001] The invention relates to the technical field of detection panels, in particular to a detection panel, a manufacturing method thereof and a photoelectric detection device. Background technique [0002] Flat X-ray Panel Detector (FPXD) based on thin film transistor (Thin Film Transistor, TFT) technology is a crucial component in digital imaging technology, because of its fast imaging speed, good space and With the advantages of density resolution, high signal-to-noise ratio, and direct digital output, it is widely used in medical imaging (such as X-ray chest X-ray), industrial inspection (such as metal flaw detection), security inspection, air transportation and other fields. [0003] In the existing FPXD, it usually includes a detection panel for detecting X-rays, each detection panel includes a plurality of detection pixel units, and a photodetection readout circuit is set in the detection pixel unit to convert the optical signal into an electrical sig...

AI Technical Summary

Problems solved by technology

[0004] Embodiments of the present invention provide a detection panel, its manufacturing method and detection device, which are used to solve the problem of loss of visible light in the prior art due to the fact that visible light will pass through the gap between the photodiode and the surrounding wiring to penetrate the pixel plane, and then pass through the transparent TFT substrate. out, thereby reducing the pixel sensitivity problem

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