Composite dynamic and static coupling piezoelectric actuator and driving method thereof

Abstract

The invention discloses a composite dynamic and static coupling piezoelectric actuator and a driving method thereof. The actuator comprises a first rhombic micro displacement amplifying mechanism, a second rhombic micro displacement amplifying mechanism, a third rhombic micro displacement amplifying mechanism and a driving foot. The first rhombic micro displacement amplifying mechanism comprises afirst fixing frame, and one end of the first fixing frame is fixed. A first piezoelectric stack is arranged in the first fixing frame in the axis direction. The second rhombic micro displacement amplifying mechanism and the third rhombic micro displacement amplifying mechanism are arranged on two adjacent sides of the first fixing frame respectively. The tops of the second rhombic micro displacement amplifying mechanism and the third rhombic micro displacement amplifying mechanism are connected together through the driving foot, and a second piezoelectric stack and a third piezoelectric stackare arranged in the second rhombic micro displacement amplifying mechanism and the third rhombic micro displacement amplifying mechanism respectively in the axial direction. The actuator is simple and compact in structure, can drive a motor under a static direct-current voltage or a dynamic alternating-current voltage, achieves dynamic and static coupling excitation, and has the advantages of high positioning precision and wide application range.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric actuators, and in particular relates to a composite dynamic-static coupling piezoelectric actuator based on a piezoelectric stack amplification mechanism and a driving method thereof. Background technique [0002] With the development of technology, precise positioning has become a key technology in related technical fields. For example, in the scientific and engineering applications of scanning probe microscope, micro-nano surgery, biomedicine and other fields, precise positioning technology plays a vital role. In these applications, the requirements for range of motion and resolution of the positioning system are typically on the order of millimeters and nanometers, respectively, requiring very good precision in the actuators. [0003] The factors affecting precise positioning in the actuator mainly include the control method of the actuator, mechanical structure, measurement technology an...

AI Technical Summary

Problems solved by technology

For this reason, it is usually necessary to use a displacement amplification mechanism to expand the output displacement of the piezoelectric actuator, but even with a displacement amplification mechanism, its overall range of motion is still limited

In addition, the increased output displacement is at the cost of reducing the output force, and there are still shortcomings in practicality

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