Light beam scanning device for laser micropore machining
A technology of microhole processing and beam scanning, which is applied in the direction of metal processing equipment, laser welding equipment, manufacturing tools, etc., can solve the problem of inability to realize reverse taper hole processing, cannot meet the requirements of large depth-to-diameter ratio microhole processing, and the beam offset Problems such as inability to change from time to time
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[0009] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the implementation manners in the present invention, all other implementation manners obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of the present invention.
[0010] Such as figure 1 and figure 2 A beam scanning device 100 for laser microhole processing shown includes a mounting plate 001, a reflection module, a deflection module 3, a translation module 4 and a focus module 5; the reflection module, the deflection module 3, the translation module 4 and the focus module 5 are all Set on the mounting plate 001, the reflection module includes a first reflection sub-module 1 and a ...
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