Mechanical characterization method for subsurface damage of optical glass

Abstract

The invention discloses a mechanical characterization method for subsurface damage of optical glass, which comprises the following steps: cutting an optical glass sample to obtain a section vertical to the surface, and polishing the section; performing etching treatment on the polished sample, performing ultrasonic cleaning, and drying the sample; carrying out a nano-indentation test on the driedsample section, measuring the indentation hardness and indentation elastic modulus of the section along the depth direction, and recording the depth information of each test point, wherein the included angle between the indentation direction and the surface is theta; and finally, determining the subsurface damage depth of the sample by analyzing a gradient change curve of mechanical indexes (hardness and elasticity modulus) measured in the section along the depth direction. According to the mechanical characterization method for sub-surface damage of optical glass provided by the invention, gradient change of mechanical parameters in a damaged layer is tested by using a nanoindenter, and geometric indexes and mechanical indexes of the subsurface damage can be obtained by one-time testing.

Description

technical field [0001] The invention relates to a mechanical characterization method of subsurface damage of optical glass, in particular to a method for testing subsurface damage of optical glass ultra-precision processing based on a nano indenter. Background technique [0002] Optical glass components are usually obtained by ultra-precision machining (grinding, grinding and polishing, etc.) after cutting the blank material. In the process of processing, residual damage (cracks, pits, scratches, plastic deformation and residual stress, etc.) is inevitable on the surface of the material. The damaged layer will significantly affect the application performance of optical components (optical coefficient, laser damage threshold and friction and wear performance, etc.). Therefore, it is necessary to effectively characterize the processed subsurface damage layer of optical glass in order to optimize the ultra-precision processing technology and improve the processing quality of t...

AI Technical Summary

Problems solved by technology

For the subsurface damage caused by ultra-precision machining, through the analysis of the above detection methods, it can be known that there are many detection methods for the depth of the crack layer; the depth of the residual stress layer is generally detected by chemical corrosion method, and the detection results of this method are less affected by the environment. Big

Therefore, to obtain complete subsurface damage information, at least two of the above methods must be combined, and the process is cumbersome and inefficient

In addition, at present, the subsurface damage layer of optical glass is generally characterized by geometric indicators, which has certain limitations in evaluating its mechanical properties.

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