Electron beam irradiation device and equipment
An electron beam irradiation, electron beam technology, applied in the field of irradiation control, can solve the problems of difficult samples, irradiation, poor adjustability of irradiation area, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
no. 1 example
[0028] Such as figure 1 As shown, the application provides an electron beam irradiation device, which includes: an electron beam generating unit 10, an electron beam control unit 20, an irradiation chamber 30, a secondary electron collector 40, a signal processing unit 50, and the electron beam The electron beam output end of the beam generating unit 10 is opposite to the irradiation chamber 30, the electron beam control unit 20 is arranged between the electron beam output end of the electron beam generating unit 10 and the irradiation chamber 30, and the secondary electron collector 40 is arranged In the irradiation chamber 30 , the signal processing unit 50 is electrically connected with the secondary electron collector 40 and the electron beam control unit 20 .
[0029] When the electron beam irradiation device designed above starts to operate, the electron beam generating unit 10 generates electron beams, and the electron beams reach the sample through the electron beam co...
no. 2 example
[0048] The present application also provides an electron beam irradiation equipment, which includes a photoelectric device and the electron beam irradiation device in any optional implementation mode in the first embodiment, and the photoelectric device is arranged in the irradiation chamber. Used to test the electrical and optical properties of irradiated samples.
[0049] Since the implementation manner in this embodiment is basically the same as the process in the first embodiment, details are not repeated here.
[0050] The electron beam irradiation equipment designed above realizes high-precision simulation of low-energy electron beams with different energies and intensities, and realizes high-precision control of electron beam intensity. Through precise control of electron irradiation in the designated area and area of the sample , can be used for accurate simulation of electron beam irradiation and multifunctional testing of optical and electrical properties of irradi...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


