Three-stage evaporation high-speed roll-to-roll vacuum lithium film production device
A production device and stage evaporation technology, which is applied in the field of three-stage evaporation high-speed roll-to-roll vacuum lithium thin film production equipment, can solve the problems of rapid temperature rise of the substrate, material vapor cannot be attached to the coating, and the heat capacity of the coating substrate is small. Achieve the effects of improving high temperature phenomena, improving uneven deposition, and improving raw material utilization
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Embodiment 1
[0049] Such as figure 1 as shown,
[0050] A three-stage evaporation high-speed roll-to-roll vacuum lithium film production device, including a frame, the frame is made of stainless steel, a first partition and a second partition are arranged in the frame, the first partition and the second The partitions are arranged vertically, and the first partition and the second partition are provided with a corresponding window, the window is rectangular, parallel to the axis of the cooling roll, and its length is slightly greater than the width of the base film. The length of the passage window is selected to be greater than the width of the base film by 6m, and the inside of the frame is divided into the unwinding chamber, the first coating chamber, the winding chamber, and the base film by the first partition and the second partition successively. Pass through the window from the unwinding chamber to the winding chamber;
[0051] The first coating chamber is provided with a three-s...
Embodiment 2
[0069] A three-stage evaporation high-speed roll-to-roll vacuum lithium film production device, including a frame, the frame is made of stainless steel, a first partition and a second partition are arranged in the frame, the first partition and the second The partitions are arranged vertically, and the first partition and the second partition are provided with a corresponding window, the window is rectangular, parallel to the axis of the cooling roll, and its length is slightly greater than the width of the base film. The length of the passage window is selected to be greater than the width of the base film by 6m, and the inside of the frame is divided into the unwinding chamber, the first coating chamber, the winding chamber, and the base film by the first partition and the second partition successively. Pass through the window from the unwinding chamber to the winding chamber;
[0070] The first coating chamber is provided with a three-stage evaporation mechanism, and the th...
Embodiment 3
[0089] A three-stage evaporation high-speed roll-to-roll vacuum lithium film production device, including a frame, the frame is made of stainless steel, a first partition and a second partition are arranged in the frame, the first partition and the second The partitions are arranged vertically, and the first partition and the second partition are provided with a corresponding window, the window is rectangular, parallel to the axis of the cooling roll, and its length is slightly greater than the width of the base film. The length of the passage window is selected to be greater than the width of the base film by 6m, and the inside of the frame is divided into the unwinding chamber, the first coating chamber, the winding chamber, and the base film by the first partition and the second partition successively. Pass through the window from the unwinding chamber to the winding chamber;
[0090] The first coating chamber is provided with a three-stage evaporation mechanism, and the th...
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Abstract
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