Heating and cooling portable sample stage equipment based on liquid nitrogen refrigeration

A technology of liquid nitrogen refrigeration and refrigeration equipment, which is applied in the direction of ion implantation plating, metal material coating process, coating, etc., to achieve the effect of reasonable structure, convenient use, and expanding the range of sample types

Pending Publication Date: 2020-04-24
ZHEJIANG UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

With the continuous development of vacuum coating technology, the temperature requirements of different materials for coating processing are also changing, but there is no portable low-temperature sample table to solve such problems.

Method used

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  • Heating and cooling portable sample stage equipment based on liquid nitrogen refrigeration
  • Heating and cooling portable sample stage equipment based on liquid nitrogen refrigeration

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Embodiment Construction

[0015] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings:

[0016] Such as Figure 1-2 As shown, a portable sample stage device for heating and cooling based on liquid nitrogen refrigeration includes a cavity 9, a cooling device inside the cavity, a cooling device outside the cavity, a control display device, and a sample fixing device.

[0017] The intracavity refrigeration device includes an S-shaped copper coil 16 and a support column 15 , wherein the support column 15 is fixed in the cavity 9 , and the S-shaped copper coil 16 is fixed on the support column 15 .

[0018] The cooling device outside the chamber includes a copper tube 3, a copper coil 2, a liquid nitrogen tank 1 and a nitrogen tank 14, which are connected to the copper coil 2 through the copper tube 3 covered with asbestos, and the copper coil 2 is placed in the liquid nitrogen tank 1, and communicate with the nitrogen tank 14 through...

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Abstract

The invention discloses heating and cooling portable sample stage equipment based on liquid nitrogen refrigeration. The equipment includes a cavity, a refrigeration device in the cavity, a cooling device outside the cavity, a control display device and a sample fixing device; the refrigeration device in the cavity includes supporting columns and an S-shaped copper coil pipe arranged on the supporting columns; and the cooling device outside the cavity includes a nitrogen tank, a liquid nitrogen tank, a copper coil pipe and a copper pipe, the copper coil pipe is arranged in the liquid nitrogen tank and communicates with the nitrogen tank through a connecting pipe, and the copper coil pipe communicates with the S-shaped copper coil pipe through the copper pipe. The equipment has the followingbeneficial effects: the equipment is ingenious in design, reasonable in structure, and convenient to use; and when the equipment is used to adjust the temperature of samples, the requirements of processing temperature for different substrates are conveniently met, the type range of the samples that can be processed by a vacuum coating machine is expanded, and the equipment has important significance in the field of research of vacuum coating.

Description

technical field [0001] The invention relates to the technical field of vacuum coating, in particular to a portable sample stage device for heating and cooling based on liquid nitrogen refrigeration. [0002] technical background [0003] Vacuum deposition technology (vacuum deposition) is a novel new technology of material synthesis and processing, which is an important part of the field of surface engineering technology, and provides a new process for thin film preparation for scientific research and actual production. Compared with the wet coating method, the vacuum coating improves the bonding ability of the film, can better control the uniformity and thickness of the film, and reduces the pollution to the environment. With the continuous development of vacuum coating technology, the temperature requirements of different materials for coating processing are also changing, but there is no portable low-temperature sample table to solve such problems. For this reason, the in...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50C23C14/54
CPCC23C14/50C23C14/541
Inventor 马毅吴伊帆谢续友黄先伟俞越翎张泰华
Owner ZHEJIANG UNIV OF TECH
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