Manufacturing method of shield gate trench power device
A technology of power devices and manufacturing methods, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve problems such as process hidden dangers, decreased adhesion, photoresist defects, etc., to shorten process time and improve reliability performance, avoiding the effect of undercutting
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[0057] The manufacturing method of the shielded gate trench power device of the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. According to the following description and drawings, the advantages and features of the present invention will be clearer. However, it should be noted that the concept of the technical solution of the present invention can be implemented in many different forms and is not limited to the specific implementation set forth herein. example. The drawings are in a very simplified form and all use imprecise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.
[0058] The terms "first", "second", etc. in the specification are used to distinguish between similar elements, and are not necessarily used to describe a specific order or time sequence. It is to be understood that, under appropriate cir...
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