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Laser directional waveguide coupling structure

A technology of coupling structure and waveguide structure, which is applied in the field of laser directional waveguide coupling structure, can solve problems such as difficult to realize directional waveguide coupling, and achieve the effect of simple structure and easy manufacture

Active Publication Date: 2020-04-28
NANJING UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the optical modes coupled into the waveguide propagate symmetrically to both sides of the waveguide, making it difficult to achieve directional waveguide coupling

Method used

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Embodiment 1

[0049] Such as figure 1 As shown, a laser directional waveguide coupling structure includes a metal-semiconductor resonator and a semiconductor waveguide structure at the bottom of the metal-semiconductor resonator. Material layer, the material of the insulating material layer is SiO 2, the metal material layer is Ag; the metal semiconductor includes a lower cladding layer, a core layer, an upper cladding layer and a top and upper layer stacked in sequence, and the lower cladding layer is arranged near one end of the semiconductor waveguide structure. Among them, the core layer is made of InGaAs material with a thickness of 300nm and a refractive index of 3.53; the lower cladding layer is made of n-doped InP material with a thickness of 350nm and a refractive index of 3.17; the upper cladding layer is made of p-doped InP material with a thickness of 500nm. The refractive index is 3.17; the top layer is p-doped InGaAs material with a thickness of 100nm and a refractive index o...

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Abstract

The invention provides a laser directional waveguide coupling structure. The laser directional waveguide coupling structure comprises a metal semiconductor resonant cavity and a semiconductor waveguide structure located at the bottom of the metal semiconductor resonant cavity; the metal semiconductor resonant cavity comprises a metal semiconductor, an insulating material layer and a metal materiallayer which sequentially wrap the surface of the metal semiconductor. The waveguide directional coupler is simple in structure and easy to manufacture, and can achieve the directional coupling outputof the energy of a nano laser in a waveguide.

Description

technical field [0001] The invention belongs to the field of semiconductor lasers, in particular to a laser directional waveguide coupling structure. Background technique [0002] Metal-semiconductor resonator lasers have been widely used as ultra-small light sources in the fields of large-scale photonic integrated circuits and optical communications due to their small size and low excitation energy. The waveguide coupling of metal-semiconductor resonators is the technical basis for the above applications. At present, scientific researchers have developed a variety of resonant cavity waveguide coupling structures, among which the embedded waveguide structure at the bottom of the resonant cavity can obtain higher coupling efficiency. However, the optical modes coupled into the waveguide propagate symmetrically to both sides of the waveguide, making it difficult to achieve directional waveguide coupling. Contents of the invention [0003] The object of the present inventio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01S5/10
CPCH01S5/1028
Inventor 张柏富胡海峰朱康
Owner NANJING UNIV OF SCI & TECH