Analysis device, float glass manufacturing device, analysis method, and float glass manufacturing method

Abstract

Provided is an analysis device capable of reducing variations in the thickness of the glass substrate by suppressing the width variation of the glass ribbon in the molten metal tank, a float glass manufacturing device, an analysis method, and a float glass manufacturing method. The float glass manufacturing device (1) is equipped with a melting furnace (10), a molten metal tank (20), a slow cooling furnace (30), and an analysis device (40). Multiple pairs of upper rollers (50) are arranged in the metal liquid tank (20). The upper roller (50) has a plurality of protrusions (52) on the outer periphery of the tip portion (51) in contact with the glass ribbon (22), and recesses (T) are formed on the glass ribbon (22) at intervals in the flow direction. The concave part (T) is photographed by the imaging part (41) of the analyzing device (40), the position and interval of the recess (T) are calculated by the image processing recognition unit (42), and the upper roller (50) that causes the variation in the plate thickness deviation is identified.

Description

technical field [0001] The present invention relates to an analysis device, a float glass manufacturing device, an analysis method, and a float glass manufacturing method. Background technique [0002] The plate thickness variation in the whole surface of the glass substrate for flat panel displays (FPD) affects the focus shift of the exposure machine in a photolithography process. Glass substrates for FPDs, especially glass substrates for liquid crystal displays (LCDs), have strict requirements for plate thickness variation, for example, they are required to be 20 μm or less within a range of 1500 mm. The plate thickness deviation refers to the difference between the maximum value of the plate thickness and the minimum value of the plate thickness. [0003] As a method of reducing plate thickness variation, Patent Document 1 proposes to divide the heater area of ​​the molten metal tank along the flow direction and width direction of the glass ribbon, install a plurality of...

AI Technical Summary

Problems solved by technology

In addition, fluctuations in the width direction of the glass ribbon may cause the problem that the requirements for plate thickness variation cannot be met.

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