Detachable high-frequency coil and silicon core furnace

Abstract

The invention provides a detachable high-frequency coil and a silicon core furnace. The detachable high-frequency coil comprises a peripheral coil and a drawing disc. The drawing disc is located in anarea defined by the peripheral coil, and the drawing disc is detachably connected with the peripheral coil. The drawing disc comprises a disc body and drawing parts installed on the disc body, drawing holes are formed in the drawing parts, and the disc body is detachably connected with the drawing parts. When the positions of the drawing holes of the detachable high-frequency coil are damaged, the whole drawing disc can be directly replaced or damaged drawing parts can be independently replaced, replacement is rapid and convenient, and the coil replacement efficiency is high. The silicon corefurnace comprises the detachable high-frequency coil, the furnace shutdown time is short when the coil is replaced, and the working efficiency is high.

Description

technical field [0001] The invention relates to the field of high-frequency coils, in particular to a detachable high-frequency coil and a silicon core furnace. Background technique [0002] Polycrystalline silicon is a form of elemental silicon. When molten elemental silicon solidifies under supercooled conditions, silicon atoms are arranged in the form of diamond lattices to form many crystal nuclei. If these nuclei grow into crystal grains with different crystal plane orientations, these The grains combine to crystallize into polysilicon. [0003] Silicon core is the seed crystal used in the improved Siemens method reduction furnace in the upstream of the photovoltaic industry. It is mainly used for the production of high-purity primary polysilicon. At present, the domestic use of silicon core is very large. [0004] The silicon core furnace is a device for drawing silicon cores. In the silicon core furnace, the high-frequency coil converts the high-frequency current int...

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Problems solved by technology

[0005] The high-frequency coil is a consumable product with a short service life, mainly because the columnar crystal that rises with the seed crystal during the drawing process is prone to shaking and swinging due to the influence of the argon flow, resulting in contact with the drawn hole , once contacted, there will be an instant ignition phenomenon, making the entire high-frequency coil scrapped, however, most of the damaged parts are at the position of the drawing hole, and other parts are relatively intact

[0006] The traditional high-frequency coil is an integrated structure. Therefore, when the position of the drawn hole is damaged, the high-frequency coil must be replaced as a whole. When replacing the high-frequency coil, the water needs to be cut off and the coil connection seat, grounding wire, etc. need to be disassembled. The operation is very cumbersome and It is difficult and time-consuming. In addition, the cost of replacing the high-frequency coil as a whole is also high

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