A Calculation Method of No-charge Equilibrium Voltage of Non-conductive Ceramic Material
A ceramic material and balanced voltage technology, which is applied in the analysis of materials, material analysis using wave/particle radiation, instruments, etc., can solve the problems of high subjectivity and low efficiency, and achieve strong repeatability, simple operation and accuracy high effect
Active Publication Date: 2021-05-25
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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However, the qualitative adjustment based on the brightness and darkness of the image is highly subjective, and the operator needs to repeatedly adjust the parameters of the scanning electron microscope, which is inefficient
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Embodiment 1）
[0041] Step 1: Take a surface sample from a non-conductive ceramic sample and perform mechanical polishing to ensure that the surface to be tested is flat and parallel to the bottom surface. In this embodiment, the ceramic sample is a hot-pressed sintered lutetium aluminum garnet laser ceramic (LuAG).
[0042] Step 2: On the basis of step 1, the surface of the sample does not need to be evaporated and deposited with a conductive film, and placed on the sample stage of the scanning electron microscope, adjust the working distance of the scanning electron microscope to the optimal value for X-ray energy spectrum collection; set the incident accelerating voltage E 0 5KV; the current of the incident electron beam is 0.2nA; the dead time of the energy spectrometer is guaranteed to be greater than 40%. specifically, figure 1 Shown is a spectrogram of an X-ray energy spectrum signal of a lutetium aluminum garnet laser ceramic (LuAG) under an unbalanced voltage of 5KV according to a...
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The invention provides a method for calculating the non-charge balance voltage of non-conductive ceramic materials, which includes: setting the optimal working distance for X-ray energy spectrum analysis; scanning electron microscope incident acceleration voltage continuously changes at specified intervals, and collecting X-ray energy spectrum signals ; Store all counting points of the X-ray energy spectrum signal collected as TXT format and import in the Matlab program, adopt linear fitting to calculate the upper limit voltage of the corresponding energy spectrum line of each X-ray energy spectrum signal; the calculated upper limit The voltage is imported into the Matlab program for piecewise linear fitting, and the two intersection values of the piecewise fitting curve and the theoretical straight line are calculated, and the two intersection points are the uncharged equilibrium voltage of the sample to be tested. The method according to the invention can be directly applied to the scanning electron microscope morphology observation of common ceramic samples and other non-conductive materials, and has simple operation, accurate result and strong repeatability.
Description
technical field [0001] The present invention relates to the field of scanning electron microscope morphology and composition characterization of non-conductive ceramic materials, in particular, relates to a non-conductive ceramic material charge-free balance voltage V 1 and V 2 calculation method. Background technique [0002] Scanning Electron Microscope (SEM) has many advantages such as high image resolution (3nm~0.6nm), large depth of field (10 times that of optical electron microscope), non-destructive analysis and simple sample preparation. Samples can be natural surfaces, fractures, blocks, reflective and translucent light sheets, etc. At the same time, equipped with accessories such as Energy Dispersive X-Ray Spectroscopy (EDX), it can comprehensively analyze information such as morphology, chemical composition, and element distribution. One of the main means. [0003] However, for non-conductive materials, such as most ceramic materials, the incident electrons of...
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IPC IPC(8): G01N23/2251
CPCG01N23/2251G01N2223/079
Inventor 王墉哲林初城张积梅姜彩芬曾毅
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI