Arsine gas absorption and filtration system

A filter system and gas absorption technology, which is applied in the direction of measuring devices, instruments, scientific instruments, etc., can solve the problems of explosion and human injury, and achieve the effect of reliable absorption and filtration, and avoiding leakage

Pending Publication Date: 2020-05-05
紫石能源有限公司
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  • Abstract
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  • Claims
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Problems solved by technology

Due to the colorless, flammable and explosive characteristics of arsane gas, if it is not properly protected, even a small flow rate can cause great harm to human body

Method used

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  • Arsine gas absorption and filtration system

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Embodiment Construction

[0024] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0025] Such as figure 1 As shown, the embodiment of the present invention provides an arsine gas absorption and filtration system, including an electrolytic cell 1 , a gas filtration device 2 and a glove box 3 .

[0026] The electrolytic cell 1 is arranged in the glove box 3, the gas outlet of the electrolytic cell 1 is connected to one end ...

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Abstract

The invention relates to the technical field of semiconductors, in particular to an arsine gas absorption and filtration system. The arsine gas absorption and filtration system comprises an electrolytic cell, a gas filtering device and a glove box. The electrolytic cell is arranged in the glove box and connected with a gas inlet of the gas filtering device through a first conveying pipeline, and the glove box is connected with a gas inlet of the gas filtering device through a second conveying pipeline. According to the arsine gas absorption and filtration system, the electrolytic cell is arranged in the glove box, the glove box is connected with the gas filtering device through the second conveying pipeline, even if leakage exists in the electrolytic cell, the leaked arsine gas can be conveyed to the gas filtering device through the second conveying pipeline and finally absorbed by the gas filtering device, and therefore leakage of the arsine gas is effectively avoided, and the arsinegas is absorbed and filtered more safely and reliably.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to an arsine gas absorption and filtering system. Background technique [0002] In recent years, due to the vigorous development of the semiconductor industry, arsine gas, which is an essential raw material, has also ushered in rapid development. At present, domestic manufacturers of arsine mainly use chemical preparation method, which has simple process, easy-to-obtain raw materials, and low equipment investment, but the product yield is low and the impurity content is high, so it can be used only after complicated refining treatment. Mainstream arsine manufacturers abroad usually use electrochemical methods, which can produce arsine under constant concentration conditions, with high yield and purity, and easy control of the device. Compared with chemical preparation methods, they have obvious advantages in production capacity and It is more conducive to the system integrat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N33/00
CPCG01N33/00G01N33/0036
Inventor 刘文杰赵青松
Owner 紫石能源有限公司
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