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Manufacturing process for at least one diaphragm unit of a MEMS transducer

A manufacturing method and converter technology, applied in the direction of microstructure devices composed of deformable elements, semiconductor electrostatic transducers, manufacturing microstructure devices, etc., can solve problems such as limited flexibility, and achieve simplified layout and simplified follow-up Effects of handling, simplification of manufacturing methods

Active Publication Date: 2020-05-15
USOUND
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this manufacturing method is the limited flexibility

Method used

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  • Manufacturing process for at least one diaphragm unit of a MEMS transducer
  • Manufacturing process for at least one diaphragm unit of a MEMS transducer
  • Manufacturing process for at least one diaphragm unit of a MEMS transducer

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0050] figure 1 A schematic side view of several piezoelectric transducer units 3 a - 3 d built up layer by layer is shown. Four converter units 3a-3d are shown in this embodiment, where figure 1 Can only be a partial map. The converter units 3 a - 3 d are arranged on the carrier 2 . 1000 or more converter units 3a-3d can be formed on the carrier 2 to achieve mass production. Transducer units 3a-3d together with membrane 10 form a membrane unit 1 usable for MEMS transducers (see Figure 5 and subsequent figures).

[0051] It should be noted that all drawings are schematic diagrams. Dimensions and dimension ratios do not necessarily correspond to reality. In addition, the drawings are only used to illustrate the manufacturing method including individual steps. The mutual arrangement of the different features may, but need not, correspond to reality.

[0052] The converter units 3 a - 3 d are produced by forming at least one electrode layer 4 , 5 and at least one piezoel...

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Abstract

The invention relates to a manufacturing process for at least one diaphragm unit (1) of a MEMS transducer, in which multiple piezoelectric transducer units (3), each comprising at least one electrodelayer (4, 5) and at least one piezoelectric layer (6), are formed on a carrier (2). According to the invention, the carrier (2) is removed from the transducer units (3) and at least one of the transducer units (3) is arranged on a diaphragm (10) and is connected thereto, in order to form the at least one diaphragm unit (1). Moreover, the invention relates to the diaphragm unit (1).

Description

technical field [0001] The invention relates to a method for producing at least one membrane unit for a MEMS transducer, in which several piezoelectric transducer units each having at least one electrode layer and at least one piezoelectric layer are formed on a carrier. Background technique [0002] A method for producing a MEMS transducer is known from DE 603 ​​13 715 T2. The method is to apply a sacrificial layer on the substrate. Then apply the film layer, the lower electrode layer, the active layer and the upper electrode layer in sequence. The disadvantage of this manufacturing method is the limited flexibility. Contents of the invention [0003] It is therefore an object of the present invention to enable a more flexible design of the manufacturing method of the membrane unit of the MEMS transducer. [0004] This object is achieved by the production method of the invention. [0005] The invention proposes a method for the production of at least one membrane unit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04R31/00H04R19/00
CPCH04R31/00H04R19/005H04R31/006B81C1/00158B81C1/00182B81C2201/0128B81C2201/0183B81B3/0021B81B2201/0257B81B2201/036B81B2203/0127B81C2201/013B81C2201/0194
Inventor 安德里亚·韦斯高尼·克莱里西·贝尔特拉米费鲁乔·博托尼尼克·雷诺-贝慈特
Owner USOUND