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Quartz piezoelectric wafer and wafer for increasing energy locking benefit

A technology of piezoelectric wafers and quartz, which is applied in the field of quartz piezoelectric wafers and wafers, can solve the problems that the resonant frequency of small wafers is difficult to increase energy blocking benefits, and achieve the effects of increasing energy blocking benefits, good low-frequency physical characteristics, and reducing impedance

Pending Publication Date: 2020-05-22
GUANGDONG FAILONG CRYSTAL TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The invention provides a quartz piezoelectric chip with increased energy blocking benefit, which solves the technical problem that it is difficult for a small chip to increase the energy blocking benefit when the resonant frequency is low

Method used

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  • Quartz piezoelectric wafer and wafer for increasing energy locking benefit
  • Quartz piezoelectric wafer and wafer for increasing energy locking benefit
  • Quartz piezoelectric wafer and wafer for increasing energy locking benefit

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Embodiment Construction

[0019] The implementation of the present invention will be described in detail below in conjunction with the accompanying drawings. The accompanying drawings are only for reference and description, and do not constitute a limitation to the protection scope of the present invention.

[0020] Such as Figures 1 to 3 As shown, a wafer 100 includes a plurality of quartz piezoelectric wafers 10, the quartz piezoelectric wafers 10 are distributed in an array, and the first gap 6 and the second gap 7 between two adjacent quartz piezoelectric wafers 10 A hollow area of ​​the quartz piezoelectric wafer 100 is formed. The wafer 100 undergoes photolithography and laser cutting processes in the prior art to produce the quartz piezoelectric wafer 10 of the present invention.

[0021] A quartz piezoelectric wafer 10 with increased energy blocking efficiency, the quartz piezoelectric wafer 10 has a base 1, the upper surface and the lower surface of one end of the base 1 are symmetrically pr...

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Abstract

The invention provides a quartz piezoelectric wafer and wafer capable of increasing energy locking benefit. The wafer comprises quartz piezoelectric wafers arranged in an array mode. Each quartz piezoelectric wafer is provided with a substrate. Grooves are symmetrically formed in the upper surface and the lower surface of one end of each substrate. Bosses are arranged in the middles of the grooves, and the heights of the bosses are smaller than the depths of the grooves. The quartz piezoelectric wafer is provided with a groove type double-boss crystal structure, and a groove area between a boss and the edge of a substrate forms a first wafer energy sinking area. Each boss is a main oscillation area of the wafer, and the height of the boss is smaller than the depth of a groove to form a second energy sinking area of the wafer. Therefore, the groove type double-boss structure of the quartz piezoelectric wafer forms a double-energy-sink effect on the wafer. The energy locking benefit of the wafer is greatly increased, and thus the impedance of the whole wafer is reduced. Finally, the whole crystal oscillator has very good low-frequency physical characteristics.

Description

technical field [0001] The invention relates to the technical field of piezoelectric wafers, in particular to a quartz piezoelectric wafer and wafer with increased energy blocking benefits. Background technique [0002] Quartz photolithographic crystals generally refer to wafers that are structured on the surface of quartz wafers by photolithography technology, including three-dimensional structures of convex type (Mesa) and concave type (Inverted Mesa). The traditional process of developing miniaturized quartz crystals by mechanical grinding process, in addition to the size limit of physical properties, factors such as increased impedance or lower yield due to miniaturization will be the bottleneck. Technically, low-frequency small quartz crystals also need beveling, that is, thinning the edges of the quartz crystal to achieve effective energy trapping and increase the energy blocking effect. Therefore, when manufacturing ultra-small quartz crystals and low-frequency quart...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/19H03H1/00
CPCH03H1/00H03H9/19H03H2001/0021
Inventor 李宗杰
Owner GUANGDONG FAILONG CRYSTAL TECH