Method for processing exposure graphic data, exposure control unit and direct-writing exposure machine
A technology for exposure graphics and exposure control, applied in the field of exposure, can solve problems such as low production capacity and increased transmission time, and achieve the effects of increasing production capacity, increasing exposure speed, and saving transmission bandwidth
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[0027] Embodiments of the present invention are described in detail below, and the embodiments described with reference to the drawings are exemplary, and embodiments of the present invention are described in detail below.
[0028] The direct writing exposure machine needs to segment the pattern data to be exposed (referred to as exposure pattern data in the embodiment of the present invention) to the exposure control unit to realize the transfer of the exposure pattern to the substrate, wherein the segmentation is for Support scanning while sending data to realize real-time exposure.
[0029] Such as figure 1 As shown, since the exposure control unit performs rotation transformation and other processing on the data during the exposure display, in the traditional implementation method, some data of the previous segment of data needs to be sent repeatedly before each segment of data to ensure the lossless seam of graphics processing, At the end of each piece of data, some grid...
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