High-speed rotating magnetohydrodynamic drive for etching machine

Abstract

The invention relates to a high-speed rotating magnetic fluid transmission device for an etching machine, comprising: a rotating shaft, a lower casing pivotally connected to the rotating shaft, an upper casing connected to the lower casing and pivotally connected to the rotating shaft, two one by one Corresponding to the magnetic pole cavities arranged on the inner side of the lower casing and the inner side of the upper casing, two pole pieces are provided with permanent magnets and installed in the two magnetic pole cavities one by one. The magnetic fluid between the two pole pieces, the motor cavity at the lower end of the upper casing, the motor spacer ring that is sleeved outside the rotating shaft and connected to the top surface of the motor cavity, and the frameless torque motor set in the motor cavity; frameless torque The rotor of the motor is connected with the rotating shaft, and the stator of the frameless torque motor is connected with the lower end of the spacer ring of the motor; a vacuuming channel is arranged in the rotating shaft. The high-speed rotating magnetic fluid transmission device used in the etching machine occupies a relatively small space of the etching machine, and the rotation precision of the rotating shaft is high.

Description

technical field [0001] The invention relates to the technical field of magnetic fluid sealing, in particular to a high-speed rotating magnetic fluid transmission device for an etching machine. Background technique [0002] Magnetic fluid sealing technology has been widely used in etching machines due to its superiority in structure and performance; the invention patent of Chinese Patent Publication No. CN102864437A discloses a rotating device for MOCVD equipment. The fluid sealing device is connected to the motor; the traditional magnetic fluid sealing device is just a rotary sealing device with a rotating shaft, and the driving motor placed outside the rotating sealing device is connected to one end of the rotating shaft through a transmission component. When used in an etching machine, the etching machine It is necessary to set up another vacuuming channel, which has the disadvantages of low rotation precision of the rotating shaft of the magnetic fluid sealing device, whi...

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Problems solved by technology

[0003] The purpose of the present invention is to overcome the current magnetic fluid sealing device. When used in an etching machine, the etching machine needs to be additionally provided with a vacuum channel, and the rotation accuracy of the rotating shaft of the magnetic fluid sealing device is low, which occupies a large space in the etching machine. , the structure is not compact enough to provide a high-speed rotating magnetic fluid transmission device for the etching machine with a compact structure, which has a high rotation accuracy of the rotating shaft of the magnetic fluid sealing device and takes up less space in the etching machine.

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