Colloid three-dimensional reconstruction and thickness measurement method and system based on spectral confocal

Abstract

The invention provides a colloid three-dimensional reconstruction and thickness measurement method and system based on spectral confocal. The system comprises a spectral confocal sensor, a three-axismobile platform, a point cloud module, a point cloud data processing module and an input and output module. Nano-scale distance data of the glue coating colloid of awidget is acquired through spectralconfocal sensorin combination withthethree-axis mobile platform, and ordered three-dimensional point cloud data is formed through combination; invalid point correction, Z-axis overturning, pseudo-color mapping, gridding and smoothing are carried out on point cloud data, three-dimensional point cloud is updated, the distance between the focus of detected light and the focus of purple light is calculated, the function of visually measuring the thickness of needed widget colloid in real time is achieved, and through test verification, the measurement precision reaches the nanoscale.

Description

technical field [0001] The invention belongs to the technical field of high-precision measurement, and in particular relates to a colloid three-dimensional reconstruction and thickness measurement method and system based on spectral confocal. Background technique [0002] At this stage, with the miniaturization of equipment, the precision requirements for process manufacturing are getting higher and higher. In the current LED industry, the position and thickness of the batch glue application of LED tapes need to be strictly controlled, and the measurement accuracy needs to reach the nanometer level and be able to measure in real time. [0003] There are laser triangulation and microscope measurement methods for the measurement of micro parts. The height of the glued surface of the LED tape can be obtained by using the laser triangulation method, but because the width of the laser itself reaches more than ten microns, the error of the obtained data will be as high as ten mic...

AI Technical Summary

Problems solved by technology

The height of the glued surface of the LED tape can be obtained by using the laser triangulation method, but because the width of the laser itself reaches more than ten microns, the error of the obtained data will be as high as ten microns, which cannot meet the measurement requirements; and because the line laser detection It is converted into a height value through the thickness of the light and the degree of protrusion. For transparent parts, it is easy to scatter and cause poor focusing effect, which will further affect the measurement accuracy.

Microscopic measurement can meet the measurement accuracy requirements, but the measurement process is cumbersome and is mainly done manually, which is not suitable for intelligent batch real-time processing

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