Silicon wafer hydrophilicity detection device and detection method
A detection device and detection method technology, applied in the direction of measurement devices, instruments, scientific instruments, etc., can solve the problems of poor reproducibility, high production cost, unstable hydrophilicity detection results, etc., and achieve good reproducibility, high consistency, The effect of high detection efficiency
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[0031] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0032] This embodiment proposes a silicon wafer hydrophilicity detection device, such as figure 1 As shown, it includes a dropper 300, and also includes a support assembly 100 for making the silicon wafer 400 be placed obliquely at a set angle. Several liquid droplets, observing the liquid droplet flow track along the inclined direction of the silicon wafer 400, can judge whether the hydrophilicity test of the silicon wafer 400 is qualified.
[0033] Forming a silicon dioxide layer of 3-5nm on the diffusion surface of the silicon wafer 400 can ensure that the anti-PID of the components made of the corresponding battery sheet is qualified. The solution in the liquid pipe 300 is pure water, and the pure water is easy to obtain in the battery manufacturing workshop. The dropper 300 is on the surface of the side containing silicon dioxide on th...
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