Capacitance system and condenser microphone
A capacitor and electrode technology, which is applied in the field of acoustic-electric conversion devices, can solve the problems of low sensitivity and poor linearity of capacitive microphones, high sensitivity and good linearity of capacitive microphones, and avoid piston plus torsional movement and improve linearity. Accuracy and sensitivity, high degree of design freedom
Active Publication Date: 2020-07-03
AAC TECH PTE LTD
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Problems solved by technology
[0004] One of the purposes of the present invention is to provide a capacitive system to solve the technical problem that the existing capacitive system cannot make the capacitive microphone have high sensitivity and good linearity
[0005] The second object of the present invention is to provide a condenser microphone to solve the technical problems of low sensitivity and poor linearity of existing condenser microphones
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[0030] Combine below Figure 1 to Figure 10 The present invention is described in detail.
[0031] see Figure 1 to Figure 10 , The capacitive microphone provided by the embodiment of the present invention includes a capacitive system 100, the capacitive system 100 includes a fixed substrate 1 having a receiving cavity 5, a moving substrate 2 disposed in the containing cavity 5, and an elastic member 3 arranged opposite to the moving substrate 2 And the connector 4 for connecting the movable substrate 2 and the elastic member 3; the elastic member 3 drives the movable substrate 2 to move back and forth relative to the fixed substrate 1 through the connector 4 under the action of external force and its own restoring force, or the movable The substrate 2 moves back and forth relative to the fixed substrate 1 under the action of external force and the restoring force of the elastic member 3; the fixed substrate 1 includes a first surface 11 close to the connector 4 and a second ...
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The invention provides a capacitor system. The capacitor system comprises a fixed substrate with a containing cavity, a movable substrate arranged in the containing cavity, an elastic piece arranged opposite to the movable substrate and a connecting piece used for connecting the movable substrate and the elastic piece. The elastic piece drives the movable base plate to move back and forth relativeto the fixed base plate through the connecting piece under the action of external force and restoring force of the elastic piece, or the movable base plate moves back and forth relative to the fixedbase plate under the action of external force and restoring force of the elastic piece. The fixed substrate comprises a first surface close to the connecting piece and a second surface far away from the connecting piece, and the accommodating cavity penetrates through the first surface and the second surface; a plurality of fixed electrodes arranged in a comb tooth shape are arranged on the fixedbase plate towards the containing cavity in a protruding mode, a plurality of movable electrodes arranged in a comb tooth shape are arranged on the movable base plate towards the fixed base plate in aprotruding mode, and the fixed electrodes and the movable electrodes are separated in space and intersect with each other. Therefore, according to the capacitance system provided by the invention, the linearity and sensitivity of the capacitance microphone are improved, and the design freedom degree of the capacitance system is higher.
Description
【Technical field】 [0001] The invention relates to the technical field of acoustic-electric conversion devices, in particular to a capacitive system and a capacitive microphone. 【Background technique】 [0002] Micro-Electro-Mechanical-System Microphone (MEMS) microphone is an electro-acoustic transducer manufactured by micro-machining technology, which has the characteristics of small size, good frequency response characteristics, and low noise. With the miniaturization and thinning of electronic devices, MEMS microphones are more and more widely used in these devices. According to different damping methods, condenser microphones are divided into three types: pressure film damping, sliding film damping and vacuum environment. Among them, the synovial film damping adopts the comb-tooth capacitance method, and the capacitance is generated through the relative sliding movement between the comb teeth. However, in the prior art, the moving comb teeth on the edge of this type of ...
Claims
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IPC IPC(8): H04R19/00H04R19/04
CPCH04R19/005H04R19/04H04R2201/003
Inventor 但强王凯杰赵转转张睿李杨
Owner AAC TECH PTE LTD