Uniform coating method

A uniform and coating technology, applied in the direction of sputtering plating, ion implantation plating, vacuum evaporation plating, etc., can solve the problems of obvious advantages and disadvantages of operation, and achieve avoidance of defects, good coating uniformity, and good coating uniformity Effect

Inactive Publication Date: 2020-07-10
贵州省高新光电材料及器件研究院有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] But on the whole, the above methods have their own advantages and disadvantages. In pract

Method used

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Examples

Experimental program
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Example Embodiment

[0014] The technical solution of the present invention is further described below, but the scope of protection is not limited to the above.

[0015] The invention provides a method for uniform coating; a workpiece disk is installed on a rotating device in a vacuum furnace cavity, and an evaporation source is installed on the reciprocating device, so that the evaporation source can move radially perpendicular to the extension line of the rotation axis of the workpiece disk, The reciprocating device is fixed in the furnace cavity; after the product is fixed on the workpiece disk, while the rotating device drives the workpiece disk to rotate, the reciprocating device drives the evaporation source to perform radial reciprocating motion, thereby completing the coating of the product.

[0016] The rotation speed of the workpiece disc is 3~1000RPM.

[0017] The uniformity of the film layer can be adjusted by adjusting the rotation rate of the rotating device, the moving speed of the recipro...

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Abstract

The invention provides a uniform coating method. A workpiece disc is installed on a rotating device in a vacuum furnace cavity, and an evaporation source is installed on a reciprocating device, so that the evaporation source is capable of moving radially along the extension line perpendicular to the rotation axis of the workpiece disc, and the reciprocating device is fixed in the furnace cavity; and after a product is fixed on the workpiece disc, the rotating device drives the workpiece disc to rotate, and meanwhile, the reciprocating device drives the evaporation source to do radial reciprocating motion, so that coating of the product is completed. By means of the uniform coating method, the defect of a correction baffle and a planetary workpiece disc can be better avoided, and better coating uniformity is achieved by combining the swing theory of optical precision single-sided polishing.

Description

technical field [0001] The invention relates to a method for uniform coating. Background technique [0002] Coating is to form a thin film on the surface of the product by physical or chemical methods to improve the optical, mechanical, mechanical and other properties of the product surface. It is widely used in human work and life. The main methods of coating are physical deposition and chemical deposition, including thermal evaporation, electron gun, sputtering and other methods. The technical indicators of the coating generally include: thickness, absorption rate, reflectivity, transmittance, polarization performance, color, fastness, coefficient of friction, strength, water drop angle, etc. The uniformity requirement of the coating is to ensure the stability and consistency in the coating process of the whole furnace product. Generally speaking, uniformity debugging is an indispensable technology in coating production debugging. At present, there are two main ways to ...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/50
CPCC23C14/24C23C14/505
Inventor 季泳张龚磊
Owner 贵州省高新光电材料及器件研究院有限公司
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