Uniform coating method

Abstract

The invention provides a uniform coating method. A workpiece disc is installed on a rotating device in a vacuum furnace cavity, and an evaporation source is installed on a reciprocating device, so that the evaporation source is capable of moving radially along the extension line perpendicular to the rotation axis of the workpiece disc, and the reciprocating device is fixed in the furnace cavity; and after a product is fixed on the workpiece disc, the rotating device drives the workpiece disc to rotate, and meanwhile, the reciprocating device drives the evaporation source to do radial reciprocating motion, so that coating of the product is completed. By means of the uniform coating method, the defect of a correction baffle and a planetary workpiece disc can be better avoided, and better coating uniformity is achieved by combining the swing theory of optical precision single-sided polishing.

Description

technical field [0001] The invention relates to a method for uniform coating. Background technique [0002] Coating is to form a thin film on the surface of the product by physical or chemical methods to improve the optical, mechanical, mechanical and other properties of the product surface. It is widely used in human work and life. The main methods of coating are physical deposition and chemical deposition, including thermal evaporation, electron gun, sputtering and other methods. The technical indicators of the coating generally include: thickness, absorption rate, reflectivity, transmittance, polarization performance, color, fastness, coefficient of friction, strength, water drop angle, etc. The uniformity requirement of the coating is to ensure the stability and consistency in the coating process of the whole furnace product. Generally speaking, uniformity debugging is an indispensable technology in coating production debugging. At present, there are two main ways to ...

AI Technical Summary

Problems solved by technology

[0003] But on the whole, the above methods have their own advantages and disadvantages. In practice, the advantages and disadvantages of operation are obvious, and it is not an optimal method.