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Double-layer quartz process chamber structure

A technology of process chamber and quartz, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problems of short life, single-layer process chamber is easy to break, and high operating cost, so as to improve the service life, The effect of ensuring the service life and reducing the operating cost

Pending Publication Date: 2020-07-10
赛瑞达智能电子装备(无锡)有限公司
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Aiming at the problems that the single-layer process chamber adopted by the above-mentioned existing equipment is easy to break, has a short service life and high operating cost, the present invention proposes a double-layer quartz process chamber structure with a long service life and low operating cost

Method used

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  • Double-layer quartz process chamber structure
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Embodiment Construction

[0033] In the following, the present invention will be specifically described through exemplary embodiments. It should be understood, however, that elements, structures and characteristics of one embodiment may be beneficially incorporated in other embodiments without further recitation.

[0034] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "inner", "outer", "upper", "lower", "front", "rear" etc. are based on the The positional relationship is only for the convenience of describing the present invention and simplifying the description, but does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and should not be construed as indicating...

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Abstract

The invention discloses a double-layer quartz process chamber structure which is installed on a heating furnace body and includes a furnace tube. The furnace tube includes an outer furnace tube and aninner furnace tube. An interval space is formed between the inner wall of the outer furnace tube and the outer wall of the inner furnace tube; a flange is installed on the furnace pipe, and a first vent pipe is installed on a first flange; a second furnace cover is installed on a second flange, and an exhaust pipe is installed on the second furnace cover; an end opening of the rear end of the inner furnace tube is connected with the second furnace cover and communicates with the exhaust pipe; the second furnace cover is provided with an inflation tube; and the inner end of the inflation tubeextends into the interval space. The double-layer quartz process chamber structure is provided with the outer furnace tube and the inner furnace tube, the interlayer space is formed between the furnace tubes, protective gas can be introduced through the inflation tube, so that the gas pressure of the protective gas in the interlayer space is slightly higher than that of an inner furnace tube innercavity as a process chamber, gas in the process chamber is prevented from entering the interior of an interlayer, the situation that the outer furnace tube is broken due to process reactant deposition on the inner wall of the outer furnace tube is solved, and the service life is prolonged.

Description

technical field [0001] The invention belongs to the field of wafer low-pressure coating process equipment, and in particular relates to a double-layer quartz process chamber structure. Background technique [0002] In the production of the photovoltaic industry, the process chamber of the LPCVD furnace mainly adopts a single-layer process chamber. The process chamber is made of quartz material, and the stress of quartz material and process deposits in the field of low-pressure coating process is different, and the stress value is different. Larger, the inner surface of the quartz tube used as the process chamber is easily broken due to the stress of the deposits, and the service life is very short. For the safety of personnel and equipment, the actual service life of the quartz tube must be shortened, and the quartz tube should be replaced in advance to increase the service life of the equipment. Operating costs. Contents of the invention [0003] Aiming at the problems o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/44C23C16/455
CPCC23C16/44C23C16/455
Inventor 张海林刘国霞
Owner 赛瑞达智能电子装备(无锡)有限公司
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