A Fast Swing Mirror Driven by Maxwell Force

Abstract

The invention discloses a fast deflection mirror driven by Maxwell force, which comprises a reflector, a Maxwell force actuator, a flexible support system, an angle detection system and an outer frame assembly. The reflector is installed at the center of the reflector bracket. The actuator includes a ring armature and four electromagnetic units. The ring armature is fixedly connected to the mirror bracket. The electromagnetic unit is composed of a permanent magnet, a coil winding and a stator core. The four electromagnetic units form four permanent magnetic circuits and eight AC magnetic circuit; the flexible support system mainly includes a flexible diaphragm and an axial flexible member, which provides restoring torque for the actuating torque to achieve angle control, the flexible diaphragm supports the ring armature on four sides, and the axial flexible member The ring armature is supported at the center of the lower end; the four non-contact capacitive displacement sensors in the angle detection system are evenly distributed in four directions to detect the steering angle of the mirror in real time, and generate angle feedback control and angle closed-loop control. The invention has high force density, compact structure and is convenient for processing and manufacturing.

Description

technical field [0001] The invention belongs to the field of precision tracking for precision optical platforms, has a vertically symmetrical electromagnetic structure and a novel armature structure, and specifically relates to a fast deflection mirror driven by Maxwell force. Background technique [0002] As a key device in the optical system, the fast control yaw mirror has been widely used in the fields of adaptive optics, precision tracking, target pointing, beam control and optical communication, and can be assembled in the electromechanical flip / tilt system. The function is to realize the fast and high-frequency rotation of the plane mirror, and then achieve the purpose of timely adjusting the beam tilt error, correcting the propagation direction of the optical path and stabilizing the beam. Most of the fast mirrors on the market are driven by piezoelectric ceramics or voice coil motors, and the stroke of piezoelectric ceramics is very small, only tens of microns, but ...

AI Technical Summary

Problems solved by technology

Most of the fast mirrors on the market are driven by piezoelectric ceramics or voice coil motors, and the stroke of piezoelectric ceramics is very small, only tens of microns, but the driving voltage is as high as hundreds of volts; the driving voltage of voice coil motors is more than ten volts, but less force density

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