Lamb wave resonator and preparation method thereof
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A Lamb wave resonator, high-order Lamb wave technology, applied in electrical components, impedance networks, etc., can solve the problem that low-order modes are difficult to be effectively suppressed, and achieve the effect of avoiding abnormal operation of the device
Active Publication Date: 2020-07-17
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Problems solved by technology
[0003] This application is to solve the technical problem that the low-order mode is difficult to be effectively suppressed in the high-order mode Lamb wave resonator
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preparation example Construction
[0056] Another aspect of the embodiment of the present application provides a method for preparing a Lamb wave resonator, including the following steps:
[0057] Obtain a supporting substrate 1;
[0058] preparing and forming a device structure layer on the supporting substrate 1;
[0059] The device structure layer includes: reflective layer 2, first piezoelectric film 3, second piezoelectric film 4 and electrode layer 5, reflective layer 2, first piezoelectric film 3, second piezoelectric film 4 and electrode layer 5 are stacked in sequence connect;
[0060] The cooperation between the first piezoelectric film 3 and the second piezoelectric film 4 can eliminate or reduce the unnecessary piezoelectric coefficient for exciting high-order Lamb waves.
[0061] In the embodiment of the present application, the first piezoelectric film 3 and the second piezoelectric film 4 are laminated to obtain a piezoelectric film structure; the piezoelectric coefficient and elastic constant ...
Embodiment 1
[0088] Embodiment 1 of the present application provides a Lamb wave resonator, including: a support substrate 1, an air reflection layer 2, a first piezoelectric film 3, a second piezoelectric film 4, and an electrode layer 5;
[0089] The supporting substrate 1, the reflective layer 2, the first piezoelectric film 3, the second piezoelectric film 4 and the electrode layer 5 are sequentially stacked and connected;
[0090] One of the first piezoelectric film 3 and the second piezoelectric film 4 can excite high-order Lamb waves, and the other one can eliminate or reduce piezoelectric coefficients unnecessary for exciting high-order Lamb waves.
[0091] In Example 1 of the present application, single crystal lithium niobate with Z-cut and in-plane propagation directions of 45° and 225° (Euler angles are (0,0,45°) and (0,0,225°) respectively) As the first piezoelectric film 3 and the second piezoelectric film 4, the normalized thickness (h / λ) of the two piezoelectric films is bo...
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Abstract
The invention provides a Lamb wave resonator and a preparation method thereof. The Lamb wave resonator comprises a supporting substrate, a reflecting layer, a first piezoelectric film, a second piezoelectric film and an electrode layer, wherein the supporting substrate, the reflecting layer, the first piezoelectric film, the second piezoelectric film and the electrode layer are sequentially connected in a stacked mode. The cooperation of the first piezoelectric film and the second piezoelectric film can eliminate or reduce the piezoelectric coefficient which is not needed to excite the high-order lamb wave. According to the Lamb wave resonator provided by the embodiment of the invention, two layers of piezoelectric films with different crystal orientations are arranged; the elastic constant and the piezoelectric constant of a piezoelectric material are quantitatively regulated and controlled within a certain range; the piezoelectric constant related to excitation of the low-order modeis reduced, so that the low-order mode is effectively suppressed while the resonant frequency and the electromechanical coupling coefficient of the high-order mode are ensured, and unnecessary passbands caused by other low-order modes outside the passband of the Lamb wave filter with the high-order mode are avoided.
Description
technical field [0001] The present application relates to the field of semiconductor technology, in particular to a Lamb wave resonator and a preparation method thereof. Background technique [0002] Acoustic resonators represented by Lamb waves are widely used in the field of communication. Compared with 4G communication, 5G communication puts forward higher requirements on the resonant frequency and bandwidth of the resonator. The operating frequency of the SAW resonator is mainly determined by the period of the interdigitated electrodes and the sound velocity excited in the piezoelectric material. A smaller electrode period and a higher material sound velocity can effectively increase the operating frequency of the SAW resonator. The high-order mode Lamb wave has a higher sound velocity and electromechanical coupling coefficient, so under the same interdigital electrode period, using the high-order mode Lamb wave can greatly increase the operating frequency of the resona...
Claims
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Patent Type & Authority Applications(China)
IPC IPC(8): H03H3/08H03H9/02
CPCH03H9/02818H03H9/02559H03H3/08
Inventor 欧欣郑鹏程张师斌周鸿燕黄凯
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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