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Laser crystallization device

A laser crystallization and laser beam technology, applied in lasers, laser parts, phonon exciters, etc., can solve the problems of reduced pulse oscillation efficiency, uneven oscillation energy, reduced beam shape uniformity, etc., to achieve improved reliability. Effect

Pending Publication Date: 2020-07-21
SAMSUNG DISPLAY CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As the laser usage time increases, the oscillation efficiency of the pulse decreases, causing uneven oscillation energy, which may reduce the uniformity of the beam shape

Method used

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  • Laser crystallization device
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Embodiment Construction

[0045]In this specification, when it is mentioned that a certain constituent element (or region, layer, part, etc.) is "on" another constituent element, "connected to" another constituent element, or "combined with" another constituent element, it means A certain constituent element may be arranged directly, connected to, or combined with another constituent element, or a third constituent element may be disposed therebetween.

[0046] The same reference numerals refer to the same constituent elements. In addition, in the drawings, the thicknesses, ratios, and dimensions of constituent elements are exaggerated for effective description of technical contents.

[0047] "And / or" includes more than one combination that can be defined by related constituents.

[0048] Terms such as first and second can be used to describe various constituent elements, but the above constituent elements are not limited by the above terms. The above terms are used only to distinguish one constituen...

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Abstract

A laser crystallization device according to the present disclosure may include a light source section, a first optical section, a second optical section, a blocking section, a third optical section, and a stage. The light source section can emit a first laser beam. The first optical section can change a path and a size of the first laser beam to convert the first laser beam into a second laser beam. The second optical section can divide the second laser beam and convert the second laser beam into a split laser beam; the split laser beam comprises a central laser beam and a peripheral laser beam surrounding the central laser beam, and the blocking section can block at least one part of the central laser beam. The third optical section may change a path of a laser beam passing through the blocking section among the split laser beams to convert the laser beam into a third laser beam. The stage may be disposed opposite the third optical section. The first optical section may change the path and the size of the first laser beam based on the third laser beam irradiating the stage.

Description

technical field [0001] The present disclosure relates to a laser crystallization device with improved reliability. Background technique [0002] Thin film transistors are fabricated on a substrate and applied to active matrix display devices. A thin film transistor using a polycrystalline semiconductor film has an advantage of high electron mobility and high-speed operation compared to a case using an amorphous semiconductor film. Therefore, a technique of crystallizing an amorphous semiconductor film formed on an insulating substrate such as glass to form a semiconductor film having a crystalline structure has been studied. [0003] As a crystallization method of an amorphous semiconductor film, a thermal annealing method using furnace annealing, a rapid annealing method, a laser annealing method, etc. are being considered, and these may be used in combination. Among them, the laser annealing method has the advantage that high energy can be imparted only to the crystalliz...

Claims

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Application Information

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IPC IPC(8): H01L21/268H01L21/67
CPCH01L21/268H01L21/67115H01L21/67011H01L21/02675H01L21/324H01S3/0071
Inventor 申东勋金志桓朴京镐孙明石李洪鲁崔京植
Owner SAMSUNG DISPLAY CO LTD
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