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Cleaning method for OLED Mask Open Mask surface evaporation material

A technology for vapor deposition materials and masks, which is used in vacuum evaporation coating, metal material coating process, sputtering coating, etc. question

Inactive Publication Date: 2020-07-31
四川富乐德科技发展有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that after the organic evaporation of the open mask of the OLED mask in the prior art, the pore structure and precision are affected and cannot be used, and a layer of evaporated film is formed on the surface, which is difficult to remove and seriously affects the product accuracy and yield. A cleaning method for evaporation material on the surface of an OLED mask version Open Mask is provided

Method used

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  • Cleaning method for OLED Mask Open Mask surface evaporation material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] A kind of OLED mask plate Open Mask surface vapor deposition material cleaning method that preferred embodiment of the present invention provides, comprises the following steps:

[0037] According to the structural shape of the open mask parts, select the matching fixtures for fixing;

[0038] Select materials resistant to N-methylpyrrolidone corrosion to make the liquid medicine soaking tank;

[0039] Adding electronic-grade N-methylpyrrolidone into the liquid medicine soaking tank;

[0040] Put the open mask part into the liquid medicine soaking tank for reaction;

[0041] Take out the reacted open mask parts and put them into the deionized water tank for rinsing;

[0042] Put the open mask parts after rinsing into a vacuum oven for drying.

[0043] The specific conditions for rinsing the open mask parts in the deionized water tank are as follows: the deionized water tank is located in a class 100 / 10 clean room, and the deionized water in the deionized water tank r...

Embodiment 2

[0047] Another embodiment 2 of the present invention provides a method for cleaning the surface evaporation material of an OLED mask plate Open Mask, comprising the steps of:

[0048] According to the structural shape of the open mask parts, select the matching fixtures for fixing;

[0049] Select materials resistant to N-methylpyrrolidone corrosion to make the liquid medicine soaking tank;

[0050] Adding electronic-grade N-methylpyrrolidone into the liquid medicine soaking tank;

[0051] Put the open mask part into the liquid medicine soaking tank for reaction;

[0052] Take out the reacted open mask parts and put them into the deionized water tank for rinsing;

[0053] Put the open mask parts after rinsing into a vacuum oven for drying.

[0054] The specific conditions for rinsing the open mask parts in the deionized water tank are: the deionized water tank is located in a class 100 / 10 clean room, and the deionized water in the deionized water tank remains in an overflow s...

Embodiment 3

[0057] Another embodiment 3 of the present invention provides a method for cleaning the evaporation material on the surface of an OLED mask plate Open Mask, comprising the steps of:

[0058] According to the structural shape of the open mask parts, select the matching fixtures for fixing;

[0059] Select materials resistant to N-methylpyrrolidone corrosion to make the liquid medicine soaking tank;

[0060] Adding electronic-grade N-methylpyrrolidone into the liquid medicine soaking tank;

[0061] Put the open mask part into the liquid medicine soaking tank for reaction;

[0062] Take out the reacted open mask parts and put them into the deionized water tank for rinsing;

[0063] Put the open mask parts after rinsing into a vacuum oven for drying.

[0064] The specific conditions for rinsing the open mask parts in the deionized water tank are as follows: the deionized water tank is located in a class 100 / 10 clean room, and the deionized water in the deionized water tank rema...

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Abstract

The invention discloses a cleaning method for an OLED Mask Open Mask surface evaporation material, and relates to the technical field of OLED panel production. The cleaning method comprises the following steps that according to the structural form of an Open Mask part, a tool clamp matched with the Open Mask part is selected for fixing; a material resistant to N-methyl pyrrolidone corrosion is selected to manufacture a liquid medicine soaking tank; electronic-grade N-methyl pyrrolidone is added into the liquid medicine soaking tank; the Open Mask part is put into the liquid medicine soaking tank for reaction; the reacted Open Mask part is taken out and put into a deionized water tank for rinsing; and the rinsed Open Mask part is put into a vacuum drying oven for drying treatment. The cleaning method has the advantages that an Open Mask part evaporation film can be effectively removed, and meanwhile, the influence of solvent residues on the part cleaning quality is avoided.

Description

technical field [0001] The invention belongs to the technical field of OLED panel production, and in particular relates to a method for cleaning an evaporation material on the surface of an OLED mask plate Open Mask. Background technique [0002] Vacuum evaporation is a key link in the production process of OLED panels, and Open Mask, which is an evaporation mask for organic materials and metal materials, is its key structural component. After the Open Mask is used for a period of time, a layer of evaporated film will be formed on the surface, which seriously affects the accuracy and yield of the product. Since the Open Mask parts are quite thin, ordinary cleaning methods can easily lead to deformation and scrapping of the Open Mask parts. Contents of the invention [0003] The purpose of the present invention is to solve the problem that after the organic evaporation of the open mask of the OLED mask in the prior art, the pore structure and precision are affected and can...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23G5/036C23C14/04
CPCC23C14/042C23G5/036
Inventor 惠朝先王佳欣邱俊
Owner 四川富乐德科技发展有限公司