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Piezoelectric film body wave resonator temperature sensor

A technology of temperature sensor and piezoelectric film, which is applied in the field of temperature sensing, can solve the problems of low sensitivity, low precision and high cost of thermistor temperature sensor, and achieve the effect of high sensitivity and good application prospect

Inactive Publication Date: 2020-08-04
西安柯莱特信息科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the thermistor temperature sensor has low accuracy and low sensitivity
Fiber-optic-based temperature sensors are highly accurate and sensitive, but costly

Method used

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  • Piezoelectric film body wave resonator temperature sensor
  • Piezoelectric film body wave resonator temperature sensor
  • Piezoelectric film body wave resonator temperature sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] The invention provides a piezoelectric film bulk wave resonator temperature sensor, such as figure 1 As shown, the temperature sensor includes a piezoelectric body 1 , a first electrode 2 , a second electrode 3 , a first thermal expansion portion 4 , a second thermal expansion portion 5 , a first fixed portion 6 , and a second fixed portion 7 . The first electrode 2 and the second electrode 3 are arranged on the same side of the piezoelectric body 1 . In the present invention, the first electrode 2 and the second electrode 3 are arranged on the same side of the piezoelectric body 1, and the other side of the piezoelectric body 1 is exposed. This excitation method reduces the processing steps for preparing electrodes once, that is to say, no The electrodes are again prepared on the other side of the piezoelectric body 1, which reduces the cost. The first thermal expansion part 4 and the second thermal expansion part 5 are respectively arranged at both ends of the piezoe...

Embodiment 2

[0024] On the basis of Example 1, such as image 3 As shown, a groove 8 is provided between the first electrode 2 and the second electrode 3 and on the piezoelectric body 1 . The groove 8 does not penetrate the entire piezoelectric body 1 . The width of the groove 8 is less than half the resonance wavelength. In this way, when the first thermal expansion part 4 and the second thermal expansion part 5 expand, the extrusion force reduces the width of the groove 8, strengthens the wave coupling on the left and right sides of the groove 8, and changes the piezoelectric body 1 Resonance frequency. This embodiment reflects the influence of temperature on the resonance frequency of the piezoelectric body from the direction of the influence of the coupling on the resonance frequency of the piezoelectric body 1, and realizes the temperature sensing of the piezoelectric thin film bulk wave resonator with different mechanisms.

[0025] Furthermore, thermal expansion material is arrang...

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Abstract

The invention provides a piezoelectric film body wave resonator temperature sensor. A first thermal expansion part and a second thermal expansion part are arranged at the two ends of a piezoelectric body. During application, the first thermal expansion part and the second thermal expansion part are heated to expand to change the internal stress of the piezoelectric body, so that the resonant frequency of body waves in the piezoelectric body is changed, and temperature detection is realized by detecting the resonant frequency. Since the resonant frequency of the sound wave in the piezoelectricbody is very sensitive to the stress in the piezoelectric body, the temperature sensor has the advantage of high temperature detection sensitivity, and has a good application prospect in the field oftemperature sensing.

Description

technical field [0001] The invention relates to the field of temperature sensing, in particular to a piezoelectric film bulk wave resonator temperature sensor. Background technique [0002] Temperature sensors are usually used to measure the temperature information of a given space, and convert the temperature into other signal outputs. Commonly used temperature sensors include thermistor sensors, which have the advantages of simple structure, large measurement range, and low cost. However, the thermistor temperature sensor has low precision and low sensitivity. Optical fiber-based temperature sensors are highly accurate and sensitive, but costly. Contents of the invention [0003] In order to solve the above problems, the present invention provides a piezoelectric thin film bulk wave resonator temperature sensor, the temperature sensor includes a piezoelectric body, a first electrode, a second electrode, a first thermal expansion part, a second thermal expansion part, a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/32
CPCG01K7/32
Inventor 不公告发明人
Owner 西安柯莱特信息科技有限公司
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