Piezoelectric film body wave resonator temperature sensor

A technology of temperature sensor and piezoelectric film, which is applied in the field of temperature sensing, can solve the problems of low sensitivity, low precision and high cost of thermistor temperature sensor, and achieve the effect of high sensitivity and good application prospect
CN111486984AInactive Publication Date: 2020-08-04西安柯莱特信息科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
西安柯莱特信息科技有限公司
Publication Date
2020-08-04
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention provides a piezoelectric film body wave resonator temperature sensor. A first thermal expansion part and a second thermal expansion part are arranged at the two ends of a piezoelectric body. During application, the first thermal expansion part and the second thermal expansion part are heated to expand to change the internal stress of the piezoelectric body, so that the resonant frequency of body waves in the piezoelectric body is changed, and temperature detection is realized by detecting the resonant frequency. Since the resonant frequency of the sound wave in the piezoelectricbody is very sensitive to the stress in the piezoelectric body, the temperature sensor has the advantage of high temperature detection sensitivity, and has a good application prospect in the field oftemperature sensing.
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Description

technical field

[0001] The invention relates to the field of temperature sensing, in particular to a piezoelectric film bulk wave resonator temperature sensor. Background technique

[0002] Temperature sensors are usually used to measure the temperature information of a given space, and convert the temperature into other signal outputs. Commonly used temperature sensors include thermistor sensors, which have the advantages of simple structure, large measurement range, and low cost. However, the thermistor temperature sensor has low precision and low sensitivity. Optical fiber-based temperature sensors are highly accurate and sensitive, but costly. Contents of the invention

[0003] In order to solve the above problems, the present invention provides a piezoelectric thin film bulk wave resonator temperature sensor, the temperature sensor includes a piezoelectric body, a first electrode, a second electrode, a first thermal expansion part, a second thermal expansion part, a...

Claims

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