Basket conveying mechanism of cleaning machine

Abstract

The invention discloses a basket conveying mechanism of a cleaning machine. The basket conveying mechanism comprises a basket used for bearing a wafer to be cleaned and a driving assembly used for driving the basket to swing in the circumferential direction. The basket conveying mechanism further comprises a vertical limiting assembly which is used for limiting the vertical stroke of the basket, and a horizontal limiting assembly which is used for limiting the horizontal stroke of the basket, the horizontal limiting assembly is movably connected with the vertical limiting assembly, and the basket is movably connected with the vertical limiting assembly; under the matching action of the horizontal limiting assembly and the vertical limiting assembly, the swing of the basket in the circumferential direction is decomposed and converted into movement in the horizontal direction and the vertical direction. By adding the mechanical limiting structures in the horizontal direction and the vertical direction, the arc motion of the basket in the swing process of the swing arm is converted into the linear motion in the two directions, so that the overall mechanical relation of the mechanism is improved, and the use stability of the mechanism is remarkably improved.

Description

technical field [0001] The invention relates to a product conveying mechanism, in particular to a washing machine flower basket conveying mechanism adapted to a two-tank semi-automatic washing machine, belonging to the technical field of industrial automation. Background technique [0002] Wafers, also known as silicon wafers, are products processed from silicon ingots and are used in many industries such as semiconductors, silicon carbide, sapphire, and solar photovoltaics. Due to the special structure of the wafer, millions of transistors can be etched on the wafer through a special processing technology. Therefore, the wafer has been widely used in the processing and manufacturing of integrated circuits at present. [0003] In the process of wafer processing, an essential pre-treatment process is the cleaning of the wafer. The main function of this process is to remove atoms, ions, molecules, organic contamination or Impurities such as particles can be removed to obtain ...

AI Technical Summary

Problems solved by technology

However, in the long-term actual operation, the technicians found that the swing arm transport mechanism used in this type of cleaning machine has several significant defects: first, the ubiquitous instability of the swing arm structure will cause the basket to be transported Shaking occurs during the process, resulting in an increase in the overall instability of the mechanism

Secondly, it is extremely difficult to control the speed of the swing arm transport mechanism during driving; too fast swing arm speed will cause the flower basket to shake violently, causing the wafers carried in the flower basket to collide with the cleaning machine, resulting in product scrapping and equipment failure. The structure of the machine is damaged; and the slow speed of the swing arm will greatly prolong the cleaning operation time, seriously affecting the production efficiency of the processing enterprise and disrupting the production rhythm

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