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Washing machine flower basket delivery mechanism

A technology for conveying mechanisms and cleaning machines, which is applied to conveyor objects, transportation and packaging, cleaning methods and utensils, etc., can solve problems such as affecting the production efficiency of processing enterprises, prolonging the time of cleaning operations, and damage to the structure of equipment and machines. Easy to understand, save production resources, speed up the effect of cleaning process

Active Publication Date: 2022-04-15
江苏芯梦半导体设备有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the long-term actual operation, the technicians found that the swing arm transport mechanism used in this type of cleaning machine has several significant defects: first, the ubiquitous instability of the swing arm structure will cause the basket to be transported Shaking occurs during the process, resulting in an increase in the overall instability of the mechanism
Secondly, it is extremely difficult to control the speed of the swing arm transport mechanism during driving; too fast swing arm speed will cause the flower basket to shake violently, causing the wafers carried in the flower basket to collide with the cleaning machine, resulting in product scrapping and equipment failure. The structure of the machine is damaged; and the slow speed of the swing arm will greatly prolong the cleaning operation time, seriously affecting the production efficiency of the processing enterprise and disrupting the production rhythm

Method used

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  • Washing machine flower basket delivery mechanism

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Embodiment Construction

[0024] The invention discloses a washing machine flower basket conveying mechanism adapted to a two-tank semi-automatic washing machine, the details are as follows.

[0025] like figure 1 As shown, a washing machine flower basket transport mechanism is fixedly installed on an existing washing machine, and includes a flower basket 1 for carrying wafers to be cleaned and a driving assembly for driving the flower basket 1 to swing in a circumferential direction.

[0026] The washing machine flower basket delivery mechanism also includes a vertical limit assembly for limiting the vertical stroke of the flower basket 1 and a horizontal limit assembly for limiting the horizontal stroke of the flower basket 1. Both the vertical limiting components are movably connected, and the flower basket 1 is movably connected to the vertical limiting components. Under the cooperative action of both the horizontal limiting component and the vertical limiting component, the swing of the flower ba...

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Abstract

The invention discloses a washing machine flower basket conveying mechanism, which includes a flower basket for carrying wafers to be cleaned, a drive assembly for driving the flower basket to swing in the circumferential direction, and a vertical limiter for limiting the vertical travel of the flower basket. The position component and the horizontal limit component used to limit the horizontal stroke of the flower basket, the horizontal limit component and the vertical limit component are movably connected, and the flower basket and the vertical limit component are movably connected; the horizontal limit component and the vertical limit Under the cooperation of the two components, the swing of the flower basket in the circumferential direction is decomposed and transformed into movement in the horizontal and vertical directions. The present invention converts the arc motion of the flower basket during the swinging process of the swing arm into a linear motion in two directions by adding mechanical limit structures in the horizontal and vertical directions, thereby improving the overall mechanical relationship of the mechanism and significantly improving the The stability of the institution's use is improved.

Description

technical field [0001] The invention relates to a product conveying mechanism, in particular to a washing machine flower basket conveying mechanism adapted to a two-tank semi-automatic washing machine, belonging to the technical field of industrial automation. Background technique [0002] Wafers, also known as silicon wafers, are products processed from silicon ingots and are used in many industries such as semiconductors, silicon carbide, sapphire, and solar photovoltaics. Due to the special structure of the wafer, millions of transistors can be etched on the wafer through a special processing technology. Therefore, the wafer has been widely used in the processing and manufacturing of integrated circuits at present. [0003] In the process of wafer processing, an essential pre-treatment process is the cleaning of the wafer. The main function of this process is to remove atoms, ions, molecules, organic contamination or Impurities such as particles can be removed to obtain ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/677B08B13/00
CPCH01L21/67057H01L21/67766B08B13/00
Inventor 邵树宝王福亮储冬华陈利锋赵芹何婷婷陈素荣
Owner 江苏芯梦半导体设备有限公司
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