Active gas generation device

Abstract

The purpose of the present invention is to provide an active gas generation device capable of generating an active gas with good quality. In addition, the present invention has characteristics (1) to(3). Characteristic (1) is that "an active gas generation electrode group (300) is configured such that a ground-side electrode constituting part (2X) supports a high voltage-side electrode constituting part (1X)". Characteristic (2) is that "stepped parts (115H, 115M, 115L) that protrude downward are provided in a region other than a discharge space of a dielectric electrode (110) of the high voltage-side electrode constituting part (1X), and a gap length of the discharge space (68) is determined by the height (S15) of the stepped parts". Characteristic (3) is that "in each of the high voltage-side electrode constituting part (1X) and the ground-side electrode constituting part (2X), a discharge space formation region (R68) is formed relatively thin, and regions other than the discharge space are formed relatively thick".

Description

technical field [0001] The present invention relates to an active gas generating device. Two electrodes are arranged in parallel, a high voltage is applied between the two electrodes, and active gas is obtained by generating energy obtained by discharge. Background technique [0002] As an active gas generating device that arranges two electrodes in parallel, applies a high voltage between the two electrodes, and generates an active gas from energy obtained by a discharge phenomenon in the discharge space between the two electrodes, generally A high AC voltage is applied to one electrode, and a reference voltage such as ground level is set to the other electrode. [0003] Such an active gas generating device applies a high voltage of several kVrms (Root Mean Square) to one electrode of a high-voltage power supply unit. In addition, in the space other than the discharge space formed between a pair of electrodes, in order to avoid insulation breakdown of the gas present there...

AI Technical Summary

Problems solved by technology

However, from a microscopic point of view, depending on the shape and surface condition of the metal parts of the power supply part, it is impossible to avoid the concentration of electric field intensity sufficient to cause dielectric breakdown of the surrounding gas layer.

[0004] Then, when dielectric breakdown occurs outside the discharge space, a phenomenon occurs that causes the constituent elements of nearby parts to evaporate. When the nearby parts are made of metal, this phenomenon becomes an important cause of metal contamination in the semiconductor film forming process.

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