Expanding apparatus

Abstract

The invention provides an expanding device which cools an expansion sheet with a simpler structure. The expanding device expands an expansion piece of a workpiece unit including a workpiece, the expansion piece, and an annular frame to which the outer peripheral side of the expansion piece is adhered. The expanding device comprises: a frame fixing unit having a frame support part and a frame pressing part, the frame fixing unit being configured to fix the expansion piece to the workpiece, wherein the frame supporting part can support an annular frame of a to-be-processed object unit, and the frame pressing part can clamp the annular frame together with the frame supporting part; and an expansion unit capable of expanding the expansion sheet, the frame fixing unit having an ejection port and a cooling air supply path, one end of the cooling air supply path communicating with the ejection port and the other end communicating with a cooling air supply source, wherein the discharge port iscapable of discharging cooling air supplied from the cooling air supply source toward a region between a workpiece of an expansion piece included in a workpiece unit and an inner peripheral edge of the annular frame.

Description

technical field [0001] The present invention relates to an expansion device that expands an expansion piece attached to an annular frame on its outer peripheral side radially outward. Background technique [0002] After setting a plurality of intersecting planned dividing lines (also called lanes) on the front surface of a disk-shaped wafer and forming devices in each area divided by the planned dividing lines, when the wafer is divided along the planned dividing lines , each device chip can be formed. The formed device chip is mounted and used in electronic equipment or the like. [0003] Dividing of the wafer is performed using, for example, a laser processing device. For example, a laser beam having a wavelength that is transparent to the wafer is condensed inside the wafer along a planned dividing line to form a modified layer as a starting point for dividing along the planned dividing line. [0004] A sheet called an expansion sheet is pasted on the back side of the ...

AI Technical Summary

Problems solved by technology

[0011] If the cooling chamber is assembled in the extension, it will make the extension larger

Moreover, it is not easy to cool the inner space of the cooling chamber with a large capacity in order to reliably cool the extension sheet, and the cooling cost of the extension sheet cannot be ignored.

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