Calibration device for ultrahigh-temperature pressure sensor

Abstract

A calibration device for an ultrahigh-temperature pressure sensor comprises ultrahigh-temperature temperature control equipment, a high-temperature-resistant pressure-bearing pipe, a pressure controller, a mechanical pump, a nitrogen cylinder, a sensor tool, a heat dissipation tool, an acquisition system and a temperature measurement part. In the aspect of air pressure sealing control, a to-be-tested pressure sensor is communicated with the pressure controller, that is to say, the pressure value displayed by the pressure controller is the pressure value of the to-be-tested pressure sensor. Inthe aspect of temperature control, a high-temperature-resistant pressure-bearing pipe penetrates through the two ends of the multi-temperature-zone and segmented heating ultra-high-temperature temperature control equipment, and a stable high-temperature calibration environment is provided; in addition, a temperature measuring part is arranged to detect the temperature of the to-be-tested pressuresensor in real time, and the pressure measurement error caused by the temperature is reduced. The calibration problem of the ultra-high temperature pressure sensor not lower than 1000 DEG C is solved,the whole ultra-high temperature pressure sensor can be directly calibrated, and the device is simple and easy to implement.

Description

technical field [0001] The invention relates to a calibration device for an ultra-high temperature pressure sensor, belonging to the field of pressure sensor calibration. Background technique [0002] Ultra-high temperature pressure sensors are used to measure pressure parameters in ultra-high temperature and harsh environments. They are special pressure sensors and play a very important role in ultra-high temperature extreme environments such as aerospace and industrial production. [0003] The pressure sensor calibration is to obtain the relationship between the output of the sensor and the pressure input by some method. Because the output of the pressure sensor changes with the temperature of the measured medium, that is, zero temperature drift and sensitivity temperature drift, which are also the main factors causing pressure measurement errors, so the sensor output and the temperature of the measured medium must be measured during pressure calibration. changing relatio...

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Problems solved by technology

The calibration device of Kunshan Tailai Hongcheng Sensing Technology Co., Ltd. does not consider the key temperature control problem during calibration; Peking University proposes to place a thermal resistor near the pressure sensor to ensure that the temperature of the sensor is stable during calibration. However, the device uses high temperature Signal lead transfer, on the one hand, reduces the reliability, on the other hand, it is not suitable for the calibration of the sensor with its own cable and printed board; and the high temperature heat transfer in the electric furnace will cause the seal at room temperature to be damaged during calibration. Ineffective due to temperature rise, not suitable for long-term ultra-high temperature pressure calibration

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