A 3D Integrated Programmable Optical Filter

Abstract

The invention discloses a three-dimensional integrated programmable optical filter, which comprises a substrate layer, an opaque layer and a flip-chip bonding layer. The flip-chip bonding layer and the substrate layer are independent chips, and the first The first-stage filter, the second-stage filter is made on the flip-chip bonding layer, the first-stage filter and the second-stage filter are both single-stage tunable optical filters, and the single-stage tunable optical filter consists of multiple The microrings are cascaded, vertical coupling is adopted between two adjacent stages of microrings, and a layer of opaque material is arranged between adjacent two stages of microrings. The invention utilizes the three-dimensional integration technology to greatly reduce the occupied area of ​​the chip; utilizes the vertical coupling method to improve the transmission efficiency of light, and effectively reduces the transmission loss of the high-order micro-ring filter; the two-stage filters are respectively manufactured on independent chips , can pass the screening test to get the best performance products, and can minimize the thermal crosstalk of thermo-optic effect.

Description

technical field [0001] The invention belongs to the technical fields of optical communication and microwave photons, and in particular relates to a programmable optical filter. Background technique [0002] In optical signal processing, the use of optical filters is essential, but most common filters are not adjustable. If the filtering range needs to be changed due to parameter changes, usually only a new filter can be replaced. If the filter is programmable, then in this case filter parameters can be changed quickly to meet new scene requirements. Therefore, compared with the traditional fixed optical filter, the programmable optical filter has the characteristics of flexible and convenient use. [0003] Integration is the current development trend of optoelectronic devices. Integration can reduce the volume of optoelectronic devices and increase system density. However, traditional integrated optoelectronic devices are mainly based on two-dimensional planar integration....

AI Technical Summary

Problems solved by technology

However, traditional integrated optoelectronic devices are mainly based on two-dimensional planar integration. Due to the particularity of optical transmission, small-radius curved waveguides will cause serious bending losses. Two-dimensional integration is already close to the system density limit. Therefore, the development of suitable three-dimensional integration device imperative

Images