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Adaptive Recursive Feedforward Control Method for Linear Motion System

An adaptive recursive and feedforward control technology, applied in adaptive control, general control systems, control/regulation systems, etc., can solve problems such as slow dynamic response, achieve fast dynamic response, improve dynamic response performance, and reduce computational complexity Effect

Active Publication Date: 2021-07-13
TSINGHUA UNIV
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  • Claims
  • Application Information

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Problems solved by technology

[0003] In view of the above problems, the purpose of the present invention is to provide an adaptive recursive feedforward control method for a linear motion system to improve the dynamic performance of the linear motion system, solve the problem of slow dynamic response, and have better sensitivity and stability output characteristics

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  • Adaptive Recursive Feedforward Control Method for Linear Motion System
  • Adaptive Recursive Feedforward Control Method for Linear Motion System
  • Adaptive Recursive Feedforward Control Method for Linear Motion System

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Embodiment Construction

[0047] Embodiments of the present invention will be described below with reference to the accompanying drawings. Those skilled in the art would recognize that the described embodiments can be modified in various ways or combinations thereof without departing from the spirit and scope of the invention. Accordingly, the drawings and description are illustrative in nature and not intended to limit the scope of the claims. Also, in this specification, the drawings are not drawn to scale, and like reference numerals denote like parts.

[0048] In the relevant control field of ultra-precision linear motors in step-scanning lithography machines, there are extremely high precision requirements for trajectory tracking accuracy, settling time, and dynamic response speed. These control performances directly determine the overlay of the lithography machine. Accuracy, resolution, productivity and other indicators. The self-adaptive recursive feed-forward control method of the invention c...

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Abstract

The invention discloses an adaptive recursive feed-forward control method for a linear motion system, which includes: determining the power spectrum of the output error of the linear motion system according to a feedback controller controlling the linear motion system, and extracting the vibration value according to the power spectrum Eigenfrequency; determine the equivalent disturbance force of the periodic disturbance signal according to the extracted eigenfrequency, and determine the feedforward control signal of the estimated disturbance force according to the equivalent disturbance force; obtain the Fourier transform based on the recursive least squares algorithm The parameter update law of the coefficient; perform parameter iteration according to the parameter update law to obtain the optimal Fourier coefficient; input the feedforward control signal under the action of the optimal Fourier coefficient into the linear motion system for motion control . The invention greatly reduces the calculation amount, effectively improves the dynamic response performance of the system, and has the characteristics of fast dynamic response, high control precision and good robust performance.

Description

technical field [0001] The invention relates to the technical field of control of a workpiece table in a photolithography machine, in particular to an adaptive recursive feedforward control method for a linear motion system. Background technique [0002] The ultra-precision linear motor is the key component in the workpiece table of the lithography machine to achieve the final motion accuracy, and its control performance directly determines the resolution, productivity and other performance of the lithography machine. The most important issue in the motion control of linear motors in the lithography machine workpiece table is how to improve the fast dynamic response ability of tracking the periodic vibration of the projection objective lens. At present, the adaptive feedforward offset control algorithm is commonly used to improve the dynamic response capability of the system. However, the existing adaptive feedforward offset control algorithm has a large amount of calculatio...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B13/02
CPCG05B13/024
Inventor 朱煜李鑫宋海嵩张鸣成荣杨开明
Owner TSINGHUA UNIV
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