Variable-volume refrigeration system applied to low-temperature pump as well as variable-volume method and system

Abstract

The invention discloses a variable-volume refrigeration system applied to a low-temperature pump as well as a variable-volume method and system. The variable-volume refrigeration system comprises a volume regulating unit, wherein the volume regulating unit comprises a first pressure sensor, a second pressure sensor, a volume supplement unit and a controller; the first pressure sensor is used for acquiring the pressure of the gas outlet end of an oil filter; the second pressure sensor is used for acquiring the pressure of the gas inlet end of a balance tank; the gas outlet end of the volume supplement unit is connected to a gas return pipeline through an electric valve and positioned on the downstream side of the balance tank; the balance tank and the volume supplement unit are connected with a compressor through the gas return pipeline; and the controller is used for controlling the electric valve to open and close. According to the variable-volume refrigeration system, two pressure sensors are mounted in an original refrigeration system, the pressure of a gas exhaust pipeline and that of the gas return pipeline are acquired in real time, and a gas storage tank is connected to thegas return pipeline by controlling the electric valve to open and close according to the comparison between the acquired pressure and the preset pressure; and consequently, the system pressure difference and the pressure of the gas exhaust pipeline are changed, the system pressure stability is improved, and the energy-saving and consumption-lowering effects are achieved.

Description

technical field [0001] The invention relates to the technical field of refrigeration, in particular to a variable-volume refrigeration system, a variable-volume method, and a system applied to cryopumps. Background technique [0002] Cryopumps are widely used in the field of semiconductor and integrated circuit production. GM refrigerators are used as cold sources to achieve extremely low internal temperature condensation and adsorption of gas in the chamber, thereby achieving extremely high vacuum. The expander of the refrigerator is installed inside the cryopump, and the helium gas The compressor is placed externally. [0003] The helium compressor assembly is composed of compressor pump, heat exchanger, oil filter, adsorber, balance tank, bypass assembly, electronic control components and other components. The refrigeration system cycle of the whole machine is: helium enters through the return air pipeline Compressor assembly, the compressor pump compresses low-pressure ...

AI Technical Summary

Problems solved by technology

Although the purpose of adjusting the system pressure is achieved, the cost is high, the control rules are complicated, and the driving frequency of the compressor changes frequently, which also has a certain impact on its life.

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