Heterojunction three-dimensional magnetic field measurement Hall sensor based on planar process

Abstract

The invention discloses a heterojunction three-dimensional magnetic field measurement Hall sensor based on a planar process, and belongs to the field of magnetic measurement. The Hall sensor comprisesa substrate. The central electrode is formed on the substrate, is positioned in the center and is of a cube structure; wherein the four same cross-shaped magnetic induction regions are formed on thesubstrate and are in close contact with four side surfaces of the central electrode, each cross-shaped magnetic induction region comprises a channel layer, an isolation layer, a cap layer and a passivation layer which are sequentially arranged from bottom to top, and a delta-doped layer is arranged in the isolation layer; in the cross-shaped magnetic induction area, a grounding electrode is arranged at the tail end away from the center electrode and completely covers the surface of the tail end, and measuring electrodes are arranged at the tail ends of the two arms and completely cover the surface of the tail end. According to the Hall sensor, magnetic field induction in the X direction, the Y direction and the Z direction is successfully achieved on the premise that no other active layeris added and only one magnetic induction area is formed through heterojunctions, and high sensitivity is achieved.

Description

technical field [0001] The invention relates to the field of magnetic measurement, in particular to a three-dimensional heterojunction Hall sensor for magnetic field measurement based on planar technology. Background technique [0002] Hall sensors are widely used in automotive, biomedical, electronic products and other fields, and have become an indispensable part of modern industry. With the continuous development of industry, people have put forward further requirements for Hall sensors, not only to accurately detect one-dimensional magnetic fields, but also to achieve accurate measurement of three-dimensional magnetic fields. Compared with one-dimensional Hall sensors, three-dimensional sensors have multi-dimensional detection capabilities and higher reliability. Even if the magnetic field deflects during the detection process, it will not affect the detection accuracy, and provide more abundant and diverse data for related industries. Therefore, it can be applied in in...

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Problems solved by technology

There are two types of existing GaAs sensors: one is prepared by using only GaAs, and the other is prepared by using various materials including GaAs to form a heterojunction. The sensor prepared by the latter has great advantages in sensitivity, but There is a problem that it cannot be prepared by planar technology

At present, there must be three one-dimensional Hall sensors orthogonal to each other to realize three-dimensional sensing. The integration with the chip is more difficult, and the preparation process is more complicated and the process requirements are higher. The three one-dimensional sensors must be extremely accurate and perpendicular to each other. In order to ensure the measurement accuracy of the sensor, a small impact from the outside world will also cause errors in the measurement of the sensor

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