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Predictive maintenance system and method for vacuum pump and automatic vacuum pump purchasing system

A maintenance system and vacuum pump technology, applied in forecasting, pump testing, pump control, etc., can solve problems such as difficulty in formulating maintenance, replacement plans, large differences in vacuum pump status, and increased capital occupancy, avoiding scrap of raw materials and better results , The effect of reducing the occupancy rate of spare parts funds

Active Publication Date: 2020-09-25
CHENGDU UNION BIG DATA TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to different frequency of use and requirements for vacuum degree, the status of vacuum pumps varies greatly, making it difficult to formulate maintenance and replacement plans
At present, passive maintenance is mainly used, that is, replacement and maintenance only after the design life is reached or failure occurs. This maintenance method will affect production efficiency and even cause raw materials to be scrapped.
The more intelligent vacuum pumps are used, the more spare parts need to be purchased, resulting in higher capital occupation rate

Method used

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  • Predictive maintenance system and method for vacuum pump and automatic vacuum pump purchasing system
  • Predictive maintenance system and method for vacuum pump and automatic vacuum pump purchasing system
  • Predictive maintenance system and method for vacuum pump and automatic vacuum pump purchasing system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0053] Please refer to figure 1 , figure 1 It is a schematic diagram of the composition of the predictive maintenance system of the vacuum pump, including the embedded monitoring terminal 1, the data center server 2, the vibration sensor 5, the pressure sensor 6, the temperature sensor 7, the voltage transformer 8, and the current sensor 9. The specific scheme of this system is as follows:

[0054] The vibration sensor 5 adopts a magnetic suction method and is installed at the impeller position of the intelligent vacuum pump 3 to monitor the vibration intensity. The pressure sensor 6 adopts a threaded interface and is installed on the pressure measuring port of the intelligent vacuum pump 3 to monitor the vacuum negative pressure. The temperature sensor 7 is pasted and installed on the side of the intelligent vacuum pump 3, corresponding to the position of the motor, to monitor the temperature of the pump body. The live wire of the power cord of the intelligent vacuum pump 3 p...

Embodiment 2

[0070] Please refer to image 3 , image 3 As a schematic flow chart of a predictive maintenance method for a vacuum pump, the second embodiment of the present invention provides a predictive maintenance method for a vacuum pump, and the method includes:

[0071] Collect real-time operating data of the vacuum pump;

[0072] Obtain the real-time operation status of the vacuum pump based on the preset type data in the collected real-time operation data of the vacuum pump;

[0073] Based on the real-time operation data of the vacuum pump and the corresponding real-time operation status, judge whether the real-time operation data of the vacuum pump in the current real-time operation status is abnormal, and alarm if abnormal;

[0074] Based on the real-time operating data of the vacuum pump within the specified time interval, calculate the rate of change of the vacuum pump operating data, determine whether the rate of change of the vacuum pump operating data is abnormal, and alarm if abnorm...

Embodiment 3

[0077] Please refer to Figure 4 , Figure 4 As a schematic diagram of the composition of an automatic procurement device for a vacuum pump, the third embodiment of the present invention provides an automatic procurement system for a vacuum pump, and the system includes:

[0078] Predictive maintenance module, the predictive maintenance module is the predictive maintenance system described in the first embodiment, based on the predictive maintenance system to generate the health of vacuum pumps, and based on the health of all vacuum pumps, to generate the purchase time and quantity of vacuum pumps;

[0079] Purchasing module is used to generate purchase orders for the purchase time and quantity of vacuum pumps, and automatically purchase vacuum pumps based on the purchase orders.

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Abstract

The invention discloses a predictive maintenance system and method for a vacuum pump and an automatic vacuum pump purchasing system. According to the predictive maintenance system, by collecting real-time operation data of the vacuum pump, a real-time operation state of the vacuum pump is obtained based on the real-time operation data of the vacuum pump; whether real-time operation data of the vacuum pump in a current real-time operation state are abnormal or not is judged based on the real-time operation data and the corresponding real-time operation state of the vacuum pump; based on the real-time operation data of the vacuum pump within the specified time interval, the change rate of vacuum pump operation data is calculated to judge whether the change rate of the vacuum pump operation data is abnormal or not; and based on the real-time operation data and historical operation data of the vacuum pump, predicted operation data of the vacuum pump after the preset time interval are calculated, and the health degree of the vacuum pump is calculated based on the predicted operation data of the vacuum pump. The predictive maintenance system can monitor the state of the vacuum pump in real time; and the abnormality of the vacuum pump is found in advance through state alarming, change rate alarming and health degree prediction, and the raw material loss caused by unplanned shutdown and sudden failure is reduced.

Description

Technical field [0001] The invention relates to the field of intelligent monitoring, in particular to a predictive maintenance system and method of a vacuum pump and an automatic vacuum pump purchase device. Background technique [0002] In the production process of high-end manufacturing industries such as panels and semiconductors, vacuum technology is required in many links. It is often used to support simple remote or serial control and adopt air-cooled single-phase intelligent dry pumps. It has quiet operation, compact structure, and occupancy. Features such as small space, but high cost. Because a large number of them are used in key process links, once a sudden failure occurs, it will seriously affect production quality and efficiency, and even cause high-value raw materials to be scrapped. [0003] Smart vacuum pumps can generally only be repaired by the manufacturer. The visual inspection method is usually used for regular inspections. The main purpose is to ensure that t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B51/00F04B49/10G06Q10/00G06Q10/04G06Q10/08
CPCF04B51/00F04B49/10G06Q10/20G06Q10/04G06Q10/087
Inventor 不公告发明人
Owner CHENGDU UNION BIG DATA TECH CO LTD
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