An ultrasonic tool holder with adjustable piezoelectric ceramic preload in stages

Abstract

The invention discloses an ultrasonic knife holder capable of adjusting the pretightening force of piezoelectric ceramics in stages. Including pressure cap rods, copper sheets, piezoelectric ceramics, fixed rods, ultrasonic horns and knives, the upper and lower ends of the ultrasonic horn are respectively installed with pressure cap rods and knives, and the ultrasonic horns and pressure cap rods are alternately set There are piezoelectric ceramics and copper sheets; the pressure cap pull rod is mainly composed of the pressure cap, pull rod Ⅰ and pull rod II, which are connected coaxially from top to bottom; there are symmetrically arranged outer flanges on both sides of the bottom of the pull rod II, and the upper end surface of the outer flange It is a spiral slope; there is a columnar cavity in the middle of the upper end surface of the ultrasonic horn, and two symmetrically arranged inner flanges are arranged at the opening of the columnar cavity, and the outer flange at the bottom of the tie rod II extends into the columnar cavity. The invention adjusts the pretightening force of piezoelectric ceramics in stages by rotating the pressing cap pull rod in stages, and changes the resonant frequency of the ultrasonic vibration system by changing the pretightening force in the process of processing, reasonably increasing the actual energy conversion efficiency and increasing the ultrasonic amplitude output.

Description

technical field [0001] The invention belongs to the technical field of rotary ultrasonic machining of hard and brittle materials, and in particular relates to an ultrasonic tool handle capable of adjusting the pretightening force of piezoelectric ceramics in stages. Background technique [0002] Nowadays, with the rapid development of the Internet and artificial intelligence technology, integrated circuit products such as smart phones, automotive electronics, and wearable devices have a huge market space. The core of integrated circuit products is microelectronic chips, and the manufacture of microelectronic chips is inseparable from silicon, a hard and brittle material. At present, the demand for silicon materials in the market is increasing day by day. In addition to silicon materials, the demand for hard and brittle materials such as sapphire, ceramics, carbon fiber composites, and glass is also increasing in the market. For these hard and brittle materials, the efficien...

AI Technical Summary

Problems solved by technology

[0004] However, it is difficult to adjust the preload force of piezoelectric ceramics in the existing system. The reason is that the pressure cap (back cover) and the pull rod in the conventional ultrasonic machining system are usually separated. The force is generated when the thread is tightened. After the assembly is completed, the pre-tightening force is determined accordingly. Its size cannot be changed at will and the adjustment of the pre-tightening force has a large degree of human factors. Although the conventional assembly structure is simple and low in cost, it can It is impossible to know the size of the preload during the process, and the preload is often too large or too small

Excessive preload will affect vibration and even damage piezoelectric ceramics; too small preload will increase energy loss and reduce transducer conversion efficiency

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