An adjusting component and a fine-tuning device
A technology for adjusting components and fine-tuning devices, which is applied in photolithography exposure devices, microlithography exposure equipment, instruments, etc., can solve the problems of poor stability and low adjustment accuracy, and achieve the effect of convenient installation and simple structure
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0048] figure 1 A structural schematic diagram of a first viewing angle of a trimming device provided by the present invention. refer to figure 1 , the fine-tuning device can be used in a photolithography machine, wherein the fine-tuning device includes an adjustment base 1 , a detector 2 arranged on the adjustment base 1 , and an adjustment assembly capable of adjusting the position of the adjustment base 1 and thus the position of the detector 2 . In this embodiment, one detector 2 is located on one side of the adjustment base 1, and the other detector 2 is located on the other side of the adjustment base 1. The detection can be adjusted only by adjusting the movement or rotation of the adjustment base 1 on the XY plane. The position of device 2. Specifically, the fine-tuning device includes a plurality of adjustment components that can realize the movement of the adjustment base 1 in the three directions of X, Y, and Rz, and the position of the detector 2 thus adjusted is...
Embodiment 2
[0061] image 3 is a structural schematic diagram of another adjustment assembly provided in this embodiment. The adjustment assembly in this embodiment is basically the same as that in Embodiment 1. The difference between the two is that the second adjustment rod 34 abutting against the first adjustment rod 31 does not rotate under the action of the driving block, but moves linearly. move.
[0062] Specifically, the first adjusting rod 31 extends along the Z direction, and the driving block provided on the first adjusting rod 31 is actuated in a direction perpendicular to the axis, such as in the X direction. The second adjusting rod 34 can optionally extend along the X direction, and one end of the second adjusting rod 34 abuts against the driving block in the X direction, so that when the driving block is actuated in the X direction, the above-mentioned position of the second adjusting rod 34 is driven. One end moves linearly in the X direction. The other end of the seco...
Embodiment 3
[0071] Such as Figure 5 Shown is a structural schematic diagram of another adjustment assembly provided in this embodiment. The adjustment assembly in this embodiment is basically the same as that in Embodiment 2. The only difference between the two is that the driving block connected to the first adjustment rod 31 is an eccentric wheel. 32 ′, the eccentric wheel 32 ′ is fixedly connected with the first adjusting rod 31 , does not move along the axis of the first adjusting rod 31 , and rotates with the rotation of the first adjusting rod 31 . In addition, the installation hole for installing the adjustment assembly in the adjustment base 1 does not need to be provided with a moving passage for the drive block to move axially along the first adjustment rod 31, but a rotation channel for the eccentric wheel 32' to rotate around the first adjustment rod 31 needs to be provided. aisle. Correspondingly, one end of the second adjusting rod 34 for abutting against the driving block...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More